Manufacture system of anti-reflection structure on surface of solar cell and manufacture method thereof

A solar cell and anti-reflection technology, applied in circuits, electrical components, final product manufacturing, etc., can solve problems such as template pattern shape fixation, and achieve the effect of reducing reflectivity, improving photoelectric conversion efficiency, and increasing light absorption
CN101924166AInactive Publication Date: 2010-12-22INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI +2
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
Publication Date
2010-12-22
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention relates to a manufacture system of an anti-reflection structure on the surface of a solar cell and a manufacture method thereof, which is characterized in that a plurality of coherent laser beams are combined by a laser interference lithography system to modulate the light intensity distribution in an interference field; the material surface of a photovoltaic cell device is ablated with redistributed laser energy after modulation; and micro or nano-stage dense hole and column relief structures are generated in a large-area range so as to reduce the reflectivity, enhance the light absorption and improve the photovoltaic conversion efficiency. Lacking of external materials, the anti-reflection fine structure generated on the substrate surface by using the method is more stableand durable, and the cycle and the size of the structure can be adjusted by adjusting the incidence angle of the interference lithography system so that the received wavelength has better pertinence and has the advantage of good working band controllability.
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Description

technical field

[0001] The invention relates to a manufacturing system and a manufacturing method of a solar cell surface anti-reflection structure, which belong to the improvement of the preparation technology of the surface anti-reflection structure for improving the photoelectric conversion efficiency of the solar cell. technical background

[0002] An important way to improve the photoelectric conversion efficiency is to reduce the reflection on the surface of the solar cell, so as to improve the light absorption on its surface and thus improve the conversion efficiency. In the existing production process of solar cells, textured technology is generally used to texture the surface and increase the number of reflections of incident light on the surface of the silicon wafer, thereby increasing the absorption of incident light by the silicon wafer. For monocrystalline silicon and polycrystalline silicon battery materials, the more mature suede preparation methods are mostly...

Claims

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