Long-range surface plasma resonance sensor and preparation method thereof

A surface plasmon and resonance sensor technology, applied in ion implantation plating, vacuum evaporation plating, coating, etc., can solve problems such as unstable chemical properties, achieve good biological affinity, improve sensitivity, and easy deposition Effect

Inactive Publication Date: 2011-01-05
EAST CHINA NORMAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Metal silver as a conductive layer has a narrower half-width of the reson

Method used

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  • Long-range surface plasma resonance sensor and preparation method thereof
  • Long-range surface plasma resonance sensor and preparation method thereof

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0024] refer to figure 1 , the sensor of the present invention is formed by bonding a BK7 prism 1 with cedar oil and a glass slide 2, and the outer surface of the glass slide 2 is sequentially coated with a magnesium fluoride film 3, a silver film 4 and a gold film 5; direct contact with the biological solution; the incident P polarized light 6 is totally reflected at the interface between the slide glass 2 and the magnesium fluoride film 3, and the reflected light 7 is received by the detector.

[0025] Preparation Process:

[0026] The three layers of films on the glass slide 2 are all plated by magnetron sputtering to ensure the coating quality and accurately control the film thickness; first, the magnesium fluoride film 3 is plated on the glass slide, and the vacuum degree of the vacuum chamber is 5× 10 -4 Pa, argon partial pressure is 0.5Pa, sputtering voltage is radio frequency 700V (frequency is 13.56MHz), sputtering current is 0.18A, sputtering power is 85W, self-bia...

Embodiment 2

[0029] The structure of the sensor is the same as in Embodiment 1.

[0030] Preparation Process:

[0031] The three-layer films on the glass slide are all plated by magnetron sputtering to ensure the quality of the coating and accurately control the film thickness. First, a magnesium fluoride film 3 is coated on the glass slide, and the vacuum degree of the vacuum chamber is 5×10 -4 Pa, the argon partial pressure is 0.5Pa, the sputtering voltage is radio frequency 720V (frequency is 13.56MHz), the sputtering current is 0.21A, the sputtering power is 102W, the self-bias voltage is 440V, and the sputtering time is 43 minutes; The thickness of the magnesium fluoride thin film 3 is 650nm; then the surface of the magnesium fluoride thin film 3 is plated with a silver thin film 4, and the vacuum degree of the vacuum chamber is 5×10 -4 Pa, the argon partial pressure is 0.6Pa, the sputtering voltage is DC 310V, the current is 0.06A, and the time is 2 minutes and 15 seconds; the thic...

Embodiment 3

[0034] The structure of the sensor is the same as in Embodiment 1.

[0035] Preparation Process:

[0036] The three-layer films on the glass slide are all plated by magnetron sputtering to ensure the quality of the coating and accurately control the film thickness. First, a magnesium fluoride film 3 is coated on the glass slide, and the vacuum degree of the vacuum chamber is 5×10 -4 Pa, the argon partial pressure is 0.5Pa, the sputtering voltage is radio frequency 750V (frequency is 13.56MHz), the sputtering current is 0.23A, the sputtering power is 117W, the self-bias voltage is 460V, and the sputtering time is 38 minutes; The thickness of the magnesium fluoride thin film 3 is 650nm; then the surface of the magnesium fluoride thin film 3 is plated with a silver thin film 4; the vacuum degree of the vacuum chamber is 5×10 -4 Pa, the argon partial pressure is 0.6Pa, the sputtering voltage is DC 300V, the current is 0.05A, and the time is 2 minutes and 45 seconds; the thicknes...

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Abstract

The invention discloses a long-range surface plasma resonance sensor and a preparation method thereof. The sensor is formed by bonding a BK7 prism and a glass slide through cedar oil, wherein the outer surface of the glass slide is plated with a magnesium fluoride thin film, a silver film and a gold film in turn; the gold film is directly contacted with biological solution to be detected and is used for detecting the biological solution in a mode of angle modulation; magnesium fluoride with the refractive index of about 1.38, which is close to that of the biological solution, can form approximatively symmetric structures on two sides of a metal conductive layer so as to ensure that surface plasmas on the two sides of the metal conductive layer are coupled to form the long-range surface plasma; compared with other metals, the metal silver used as the conductive layer has a narrower half band width of a resonance absorption peak, but has unsteady chemical properties; a conductive layer gold film can make a resonance angle generate a greater transition along with the change of the refractive index of the biological solution to be detected; simultaneously, the conductive layer gold film has stable chemical properties and high biological affinity. The specific multilayer film structure can integrate the advantages of each film and effectively improve the sensitivity of biological sensors.

Description

technical field [0001] The invention relates to a biosensor and its preparation, in particular to a long-range surface plasmon resonance sensor and its preparation method. Background technique [0002] Compared with traditional biochemical analysis methods, surface plasmon resonance biosensing technology has the characteristics of high sensitivity, label-free, real-time and in-situ continuous detection, etc. It has been widely used in food safety, environmental monitoring, pharmaceutical, chemical, biology and other fields. At present, this technology has received widespread attention and developed rapidly. [0003] Theoretically, there is a reciprocal relationship between the propagation length of surface plasmon waves and the full width at half maximum of surface plasmon resonance absorption peaks. Therefore, the key issue that determines the sensitivity and resolution of SPR sensors is the propagation length of surface plasmon waves. Traditional surface plasmon resonan...

Claims

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Application Information

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IPC IPC(8): G01N21/41C23C14/35C23C14/06C23C14/18
Inventor 马学鸣王松涛蒋冬梅
Owner EAST CHINA NORMAL UNIV
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