Method for preparing silica antireflective film

A technology of silicon dioxide and anti-reflection coatings, which is applied in the direction of instruments, coatings, optics, etc., can solve the problems of poor repeatability and controllability of the refractive index of anti-reflection coatings, and achieve simple, controllable and high repeatability Effect

Inactive Publication Date: 2011-03-30
BYD CO LTD
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Problems solved by technology

[0005] In order to solve the problem of poor repeatability and controllability of the refractive index of the anti-reflection film existing in the existing anti-reflection film preparation method, the present invention provides a method for preparing a silicon dioxide anti-reflection film, comprising the following steps:

Method used

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  • Method for preparing silica antireflective film

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[0009] The invention provides a kind of preparation method of silicon dioxide anti-reflection film, comprises the following steps:

[0010] a) Mix the system containing tetraethyl orthosilicate and absolute ethanol evenly, and obtain silica sol by sol-gel method under alkaline conditions; the system also contains soluble carbonate, bicarbonate, lemon One or more of tartrates, tartrates and oxalates;

[0011] b) using the silica sol obtained in step a) to coat a film and perform heat treatment to obtain the silica anti-reflection film.

[0012] In the present invention, the silica sol is prepared by the sol-gel method commonly used by those skilled in the art. The sol-gel method comprises: uniformly mixing a system containing ethyl orthosilicate and absolute ethanol, and hydrolyzing the ethyl orthosilicate under alkaline conditions to obtain the silica sol.

[0013] Based on the total mass of the system, the content of ethyl orthosilicate is 5-20wt%, and the content of absolu...

Embodiment 1

[0026] (1) Take 20g of ammonium bicarbonate and dissolve it in 100g of deionized water to prepare a 0.2g / mL ammonium bicarbonate solution;

[0027] (2) Disperse 6.25g of tetraethyl orthosilicate in 60mL of absolute ethanol, add 1g of ammonia water, then add 1.5mL of the ammonium bicarbonate solution in step (1), stir at room temperature for 8h, age for 5d, reflux and stir in a water bath at 50°C 4h, then add 5mL PEG400 to obtain silica sol;

[0028] (3) After aging the silica sol in step (2) for 2 days, by pulling the coating film, it was placed on a 25.4mm×76.2mm×1.2mm microscope slide (refractive index 1.5146, light transmittance 91.1911%) ) coated with the silica sol, the amount of sol is 0.0052g / cm 2 ; Transfer to an oven, bake at 200°C for 1h, and sinter at 390°C for 3h.

[0029] Through the above steps, the glass sample with the anti-reflection film of this embodiment attached on the surface was obtained, which was denoted as A1.

Embodiment 2

[0031] Adopt the method identical with embodiment 1 to prepare glass sample, difference is:

[0032] In step (1), take by weighing 10g salt of wormwood and be dissolved in 100g deionized water, be mixed with the potassium carbonate solution of 0.1g / mL; In step (2), replace the bicarbonate in embodiment 1 with the potassium carbonate solution of 1.2mL ammonium solution.

[0033] A glass sample was obtained through the above steps, denoted as A2.

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Abstract

The invention provides a method for preparing a silica antireflective film, which comprises the following steps of: a) uniformly mixing a tetraethoxysilane and absolute ethyl alcohol-containing system, and preparing silica sol under the alkaline condition through a sol-gel method, wherein the system also comprises one or more of soluble carbonate, bicarbonate, citrate, tartrate and oxalate; and b) coating the silica sol prepared in the step a) and performing heat treatment so as to prepare the silica antireflective film. By the provided preparation method, an antireflective film with the refractive index of 1.18 to 1.32 and the light transmittance of 97 to 99 percent can be stably prepared, the technology is simple and controllable, and the repeatability is high.

Description

【Technical field】 [0001] The invention relates to a preparation method of a silicon dioxide antireflection film. 【Background technique】 [0002] Anti-reflection coating is also called anti-reflection coating, which is a thin film used to reduce surface reflection and increase light transmittance, which can improve the performance in the working wavelength or band. The sol-gel method for coating first appeared in the late 1960s. Monodisperse spherical block-shaped carbon dioxide was prepared by hydrolysis and polycondensation of orthoethyl silicate (TEOS) in ethanol (EtOH) solution in ammonia water. silicon particles, and thus produced the first anti-reflection coatings. However, this method has poor controllability and poor repeatability for the refractive index of the silicon oxide film. [0003] US4535026 discloses a kind of preparation method of broadband anti-reflection film, by first depositing a layer of silicon dioxide film on the substrate, then adopting weak glass...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B1/11G02B1/113
Inventor 张斌薛进营周维
Owner BYD CO LTD
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