Metal surface plated nickel/gold treatment method of ceramic metalized substrate and manufactured ceramic metalized substrate
A technology of ceramic metallization and nickel-gold electroplating, which is applied in the field of semiconductor manufacturing and ceramic metallization substrates, can solve the problems of decreased reliability of solder joints, very high requirements for solderability and solder joint reliability, and protruding edges of the coating layer. Solve the protruding edge of the coating, suitable for large-scale popularization and application, and the effect of unique and ingenious design
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[0034] In order to be able to understand the technical content of the present invention more clearly, the following embodiments are specifically described in detail. The ceramic metalized substrate is a copper clad ceramic substrate (DBC) substrate as an example, and the deposited metal is copper.
[0035] ●Production of DBC substrate with conductive edges
[0036] Negative film production process:
[0037] Raw materials (copper sheet, ceramic)-cleaning-sintering-pretreatment-resist dry film-exposure and imaging-acid etching-film removal.
[0038] Process conditions
[0039] Concentration of pre-treatment microetching solution: sulfuric acid 90~200g / l; sodium persulfate 80~150g / l;
[0040] Temperature: 30℃±10℃
[0041] Time: 60s~120s
[0042] See the finished DBC substrate with conductive edges figure 1 .
[0043] ●Ceramic sinking copper
[0044] The ceramic copper immersion technology (that is, the aforementioned ceramic deposition metal technology) conn...
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