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Manufacture process of grid-control TWT grid and mold-pressing grinding tool thereof

A manufacturing process and technology for traveling wave tubes, which are applied in the field of microwave vacuum electronic devices, can solve problems such as performance degradation, easy occurrence of splashes, etc., and achieve the effects of high qualification rate, solving grid emission problems, and high processing precision.

Active Publication Date: 2011-05-11
HUADONG PHOTOELECTRIC TECHN INST OF ANHUI PROVINCE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, since adding a covering layer on the molybdenum substrate is a complicated work, when the covering layer is not firmly attached, the covering layer attached to the grid is prone to splashing under high temperature and electron bombardment, or as the working time prolongs, the covering layer As the oxygen content absorbed by the layer gradually increases, its performance decreases, which will eventually lead to grid emission in the TWT

Method used

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  • Manufacture process of grid-control TWT grid and mold-pressing grinding tool thereof
  • Manufacture process of grid-control TWT grid and mold-pressing grinding tool thereof
  • Manufacture process of grid-control TWT grid and mold-pressing grinding tool thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0048] The manufacturing process of the grid-controlled TWT grid is as follows:

[0049] Surface cleaning treatment→surface photosensitive glue→surface drying treatment→photographic exposure→development→surface drying treatment→etching→glue removal→molding→stress relief annealing.

[0050] Specifically:

[0051] a. Surface cleaning treatment: ① use creamy MgO to evenly rub the surface of the hafnium substrate to remove and absorb impurities and adhesives on the surface of the substrate; ② use CrO 3 and H 2 SO 4 Configured as a 1:1 solution, soak the wiped grid for 20 seconds; ③Take out the soaked grid and put it in acetone solution for cleaning and dehydration for 3 minutes; ④Take out the dehydrated grid and dry it with Air dry acetone;

[0052] b. Coating photosensitive glue on the surface: put the grid with a clean surface on the rotary table of the high-speed rotating glue machine and vacuumize it, and drop the photosensitive glue on the surface of the grid drop by drop, ...

Embodiment 2

[0062] The manufacturing process of the grid-controlled TWT grid is as follows:

[0063] Surface cleaning treatment→surface photosensitive glue→surface drying treatment→photographic exposure→development→surface drying treatment→etching→glue removal→molding→stress relief annealing.

[0064] Specifically:

[0065] a. Surface cleaning treatment: ① rub evenly on the surface of the hafnium substrate with creamy MgO; ② use CrO 3 and H 2 SO 4 Configured as a 1:1 solution, soak the wiped grid for 30 seconds; ③Take out the soaked grid and put it in acetone solution for cleaning and dehydration for 3 minutes; ④Take out the dehydrated grid and dry it with Air dry acetone;

[0066] b. Coating photosensitive glue on the surface: put the grid with a clean surface on the rotary table of the high-speed rotating glue machine and vacuumize it, and drop the photosensitive glue on the surface of the grid drop by drop, and the thickness of the glue layer is controlled at 0.9um;

[0067] c. Su...

Embodiment 3

[0076] The manufacturing process flow of the grid-controlled TWT grid is as follows:

[0077] Surface cleaning treatment→surface photosensitive glue→surface drying treatment→photographic exposure→development→surface drying treatment→etching→glue removal→molding→stress relief annealing.

[0078] Specifically:

[0079] a. Surface cleaning treatment: ① rub evenly on the surface of the hafnium substrate with creamy MgO; ② use CrO 3 and H 2 SO 4 Configured as a 1:1 solution, soak the wiped grid for 25 seconds; ③Take out the soaked grid and put it in acetone solution for cleaning and dehydration for 3 minutes; ④Take out the dehydrated grid and use dry air to dry the acetone;

[0080] b. Coating photosensitive glue on the surface: put the grid with a clean surface on the rotary table of the high-speed rotating glue machine and vacuumize it, and drop the photosensitive glue on the surface of the grid drop by drop, and the thickness of the glue layer is controlled at 0.9um;

[008...

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Abstract

The invention discloses a manufacture process of a grid-control TWT (Traveling Wave Tube) grid and a mold-pressing tool thereof. The manufacture process of the grid-control TWT grid comprises the following steps: surface cleaning, surface photoresist coating, surface drying, radiographic exposure, developing, surface drying, etching, photoresist removal, compression molding and stress relief annealing. The mold-pressing tool adopted in the manufacture process of the grid-control TWT grid comprises a positioning film, an external spherical film, an internal spherical film and a steel ball, wherein the positioning film is arranged on a base; one end of the external spherical film which is connected with the base is arranged at the inner bottom end of the positioning film; the internal spherical film is arranged in the positioning film; the steel ball is arranged at one end of the internal spherical film; one end of the internal spherical film is connected with the external spherical film; and the connection surfaces of the internal and the external spherical films are both spherical. In the invention, hafnium with high work function, high melting point and boiling point and strong stability serves as a substrate for directly manufacturing a grid, and the advanced photoetching technology is adopted to improve the machining precision of the TWT grid to the optical precision. The grid manufactured by adopting the manufacture process provided by the invention has the advantages of rather high machining precision, high degree of finish, high qualification rate and the like.

Description

technical field [0001] The invention belongs to the field of microwave vacuum electronic devices, and in particular relates to a manufacturing process of a grid-controlled traveling wave tube grid and a molding abrasive tool thereof. Background technique [0002] A traveling wave tube is a power amplifier device that uses the interaction between a high-speed electron beam and a microwave signal to convert the kinetic energy of the electron beam into microwave energy. The application range of traveling wave tubes is very wide, and almost all satellite communications use traveling wave tubes as final amplifiers. In most radar systems, one or several traveling wave tubes are used as high-power amplifiers for generating high-frequency transmission pulses. According to the working mode, traveling wave tubes are generally divided into two categories: continuous wave traveling wave tubes and pulse traveling wave tubes. [0003] The traveling wave tube working in pulse mode can co...

Claims

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Application Information

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IPC IPC(8): H01J9/14G03F7/00
Inventor 吴华夏江祝苗陈明龙王莹
Owner HUADONG PHOTOELECTRIC TECHN INST OF ANHUI PROVINCE