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Method for synthesizing silicon nitride powder by using high-temperature rotary furnace

A technology of silicon nitride powder and silicon nitride powder, which is applied in the field of synthesizing silicon nitride powder and synthesizing silicon nitride powder by using a high-temperature rotary furnace, can solve the problem of difficulty in realizing large-scale industrial production, complicated process control and poor sintering quality. Stability and other issues, to achieve the effect of reducing the milling process, less process flow, and shortening the nitriding cycle

Active Publication Date: 2013-03-20
LIAONING SILICATE RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0015] The present invention solves the unfavorable factors such as long nitriding time, low yield, high energy consumption, high product cost, unstable sintering quality and complex process control of several current silicon powder high-temperature furnace firing nitriding methods. To realize the technical problems of large-scale industrial production, a method for synthesizing silicon nitride powder using a high-temperature rotary furnace is provided

Method used

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  • Method for synthesizing silicon nitride powder by using high-temperature rotary furnace
  • Method for synthesizing silicon nitride powder by using high-temperature rotary furnace
  • Method for synthesizing silicon nitride powder by using high-temperature rotary furnace

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0054] Mix high-purity silicon powder and silicon nitride powder as a diluent at a ratio of 100:20, put it into the nitriding zone of the rotary furnace, put it into the furnace door baffle plate 10, and close the furnace door 8.

[0055] Turn on the power supply of the furnace body, start the rotary switch of the furnace body, and the rotation speed is 1 revolution / min; heat up, the temperature rise rate is controlled at 3°C / min, and when the temperature reaches 350°C, close the exhaust valve 20, start the vacuum pump 6, and open the vacuum valve 5. Keep the vacuum in the furnace up to 100Pa, continue to heat up to 650°C with the same heating system, close the vacuum valve 5, open the nitrogen valve 3, and feed nitrogen into the furnace, and at the same time adjust the exhaust valve 20 to keep the furnace The nitrogen pressure is 0.03MPa, and the temperature is continuously raised to 1050°C at a heating rate of 3°C / min. When the temperature is above 850°C, vacuuming is carried...

Embodiment 2

[0062] Mix high-purity silicon powder and silicon nitride powder as a diluent at a ratio of 100:20, put it into the nitriding zone of the rotary furnace, put it into the furnace door baffle plate 10, and close the furnace door 8.

[0063] Turn on the power supply of the furnace body, start the rotary switch of the furnace body, and the rotation speed is 1 revolution / min; heat up, the temperature rise rate is controlled at 3°C / min, and when the temperature reaches 450°C, close the exhaust valve 20, start the vacuum pump 6, and open the vacuum valve 5. Keep the vacuum in the furnace up to 300Pa, continue to heat up to 750°C with the same heating system, close the vacuum valve 5, open the nitrogen valve 3, and feed nitrogen into the furnace, and at the same time adjust the exhaust valve 20 to keep the furnace The nitrogen pressure is 0.05MPa, and the temperature is continued to rise to 1150°C at a heating rate of 3°C / min. When the temperature is above 950°C, vacuuming is carried o...

Embodiment 3

[0070] Mix high-purity silicon powder and silicon nitride powder as a diluent at a ratio of 100:50, put it into the nitriding zone of the rotary furnace, put it into the furnace door baffle plate 10, and close the furnace door 8.

[0071] Turn on the power supply of the furnace body, start the rotary switch of the furnace body, and the rotation speed is 10 revolutions / min; heat up, the temperature rise rate is controlled at 3°C / min, and when the temperature reaches 350°C, close the exhaust valve 20, start the vacuum pump 6, and open the vacuum valve 5. Keep the vacuum in the furnace up to 100Pa, continue to heat up to 650°C with the same heating system, close the vacuum valve 5, open the nitrogen valve 3, and feed nitrogen into the furnace, and at the same time adjust the exhaust valve 20 to keep the furnace The nitrogen pressure is 0.03MPa, and the temperature is continuously raised to 1050°C at a heating rate of 3°C / min. When the temperature is above 850°C, vacuuming is carri...

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Abstract

The invention relates to a method for synthesizing silicon nitride powder by using a high-temperature rotary furnace, designed for overcoming the adverse factors of different levels of long nitridation time, low yield, high energy consumption, high cost of products, unstable sintering quality, complex control of process and the like in the silicon powder high-temperature furnace sintering and nitridizing methods at present and solving the technical problem of difficulty in realizing massive industrialized production. The method comprises the steps of: blending, loading in the furnace; vacuumizing; nitrodizing; cooling and discharging; grinding; and nitrodizing to ensure that the silicon nitride powder is in a loose state, and then grinding by using a grinding device until meeting the requirement on required granularity. The method disclosed by the invention has the advantages and characteristics of high efficiency, stable quality of the silicon nitride powder, less process procedures, simpleness of operation, safety, reliability and low cost, and is suitable for massive industrialized production.

Description

Technical field: [0001] The invention relates to a method for synthesizing silicon nitride powder, in particular to a method for synthesizing silicon nitride powder using a high-temperature rotary furnace. The invention belongs to the technical field of silicon nitride powder preparation. Background technique: [0002] Silicon nitride ceramic materials have the advantages of light specific gravity, high temperature strength, small thermal expansion coefficient, high elastic modulus, thermal shock resistance, oxidation resistance, corrosion resistance, wear resistance, insulation, etc., and are widely used in aviation, aerospace, petroleum, chemical industry , metallurgy, electronics, machinery, textile and nuclear energy and other fields, used to prepare various high temperature resistant, wear resistant and corrosion resistant parts, such as ceramic engines, blades, cutting tools, bearings, plungers, sealing rings, nozzles and military ceramics Armor, radome, etc., are one...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C04B35/584C04B35/626
Inventor 王世林韩绍娟许壮志薛健张明黄大勇
Owner LIAONING SILICATE RES INST
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