Contact lens type flexible microelectrode for recovery of facial paralysis
A contact lens and micro-electrode technology, which is applied in the fields of electrodes, artificial respiration, physical therapy, etc., can solve the problems of less device research and achieve the effect of easy wearing and simple structure
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[0027] The specific preparation process of this embodiment is as follows: first deposit a 3 μm-5 μm polychlorinated p-xylylene (Parylene-C) film on the Si wafer, and then throw 0.01mm-1mm polydimethylsiloxane (PDMS), 80 Dry at ℃ for 4 hours to form the structure layer of the contact lens. Then throw 5μm positive resist and pattern it, sputter noble metal (including Pt, Ir, Au, etc.) seed layer, 100-15000 Angstroms, use Lift-off process to remove photoresist, pattern the seed layer, and form the electrode circuit layer. Then, throw 0.01mm-1mm PDMS, dry at 80°C for 4 hours, then deposit 3μm-5μm Parylene-C, pattern the photoresist for the second time, and use reactive ion etching (RIE) to remove Parylene-C Cut through to expose the electrode points that form the contact lens overlay. Finally, it is cut into the contact lens structure using a precision machine tool, and can also be molded into the contact lens structure.
[0028] Such as Figure 1-Figure 3 As shown, the contact...
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