In-situ quasi synchronous detection method for detecting physicochemical properties of micro and nano structures

Abstract

The invention relates to a method for detecting physicochemical properties of micro and nano structures on the surface of a material, in particular to an in-situ quasi synchronous detection method for detecting physicochemical properties of micro and nano structures by adopting an atomic force microscope-ion migration spectrometer (AFM-IMS) or atomic force microscope-high-field asymmetric waveform ion mobility spectrometer (AFM-FAIMS) combined technology under the atmospheric environment. The method comprises the following steps of: scanning and imaging a detected sample on an atomic force microscope (AFM) to acquire physical property data, desorbing the chemical substances of the sample by using corona discharge, ionizing the chemical substances into charged ions, sending the charged ions to an ion migration spectrometer (IMS) or a high-field asymmetric waveform ion mobility spectrometer (FAIMS) in a mode of migrating the electric field or using artificial airflow by using a micro electromechanical interface device, performing separation and detection, and determining the chemical components. The method can directly correspondingly analyze the physical properties of the sample and the chemical components, and has in-situ (quasi) synchronous fixed point analysis function of the micro and nano structures; and the whole process is performed under the atmospheric environment, themethod has low limit on the sample, the analysis efficiency and the test efficiency are greatly improved, the operation is convenient and flexible, the volume cost is low, and the method is convenient for popularization and application in the field of material analysis and test.

Description

technical field [0001] The invention relates to a method for detecting the physical properties and chemical components of the surface of a solid material with a micro-nano structure, in particular to a detection method using an atomic force microscope and an ion mobility spectrometer or a high-field asymmetric waveform ion mobility spectrometer (AFM-IMS) in an atmospheric environment. Or AFM-FAIMS) combined technology, a method for in-situ quasi-simultaneous detection of physical properties and chemical components of micro-nano structures. Background technique [0002] Realizing the in-situ quasi-simultaneous analysis of the physical properties and chemical composition of the micro-nano structure of materials is a key scientific and technological issue in the research of new materials, new structures, new devices and new properties at the micro-nano scale. In-situ (quasi-)synchronous characterization of the physical properties and chemical composition of materials requires t...

AI Technical Summary

Problems solved by technology

[0007] The above-mentioned STM-MS-based methods provide an important means for in-situ (quasi) simultaneous fixed-point analysis of the physical properties and chemical compositions of the mutual "registration" of the micro-nano structures of materials, but these research work still have the following deficiencies : The use of STM that needs to work in a high-vacuum environment has high requirements for the material to be tested; the sampling method is complicated, and it is easy to damage the sample and probe; the high-resolution MS is used to detect chemical components, which is expensive

These shortcomings restrict the popularization and application of this method in the in situ (quasi) simultaneous analysis of the physical properties and chemical composition of the micro-nano structure of materials.