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Flat solar heat absorption coated plate production method and vertical coating apparatus

A flat-panel solar energy and coating device technology, applied in the field of solar thermal utilization, can solve problems such as inability to produce large areas, high deposition rate, and inappropriateness

Active Publication Date: 2011-10-05
SICHUAN GOLDSTONE-ORIENT NEW MATERIAL TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Its disadvantages are: it is fragile when colliding, and it is easy to explode when the water is cut off. At the same time, it is not suitable for building outer walls and roofs when building energy conservation is integrated.
[0004] Ordinary flat heat-absorbing coating: use electroplating, brushing, etc. to form a heat-absorbing coating on the metal substrate. way of polluting the environment
The disadvantage is that the evaporation cloud of the plating material obtained by a single electron gun is not enough to cover the width of the substrate, and two electron guns need to be used in combination to meet the uniformity of the width. At the same time, due to the high deposition rate, it is difficult to control the film thickness. For deposition The thickness of the metal layer is only about 10hm, and the solar heat absorbing film layer of the dielectric-metal interference film group is more difficult to control when the optical thickness accuracy is about 2 to 3nm
[0006] The existing continuous coating device, as described in Chinese patent 200420077693.6, is a coating for circular glass tubes. The entire production line "constitutes a closed loop" from the exit to the entrance to the continuous coating chamber as described in claim 1. The workpiece must also rotate, which cannot Production of flat solar heat absorbing coated panels with large area (the length direction of a single coated panel is greater than 600mm and the width direction is greater than 300mm)

Method used

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  • Flat solar heat absorption coated plate production method and vertical coating apparatus
  • Flat solar heat absorption coated plate production method and vertical coating apparatus
  • Flat solar heat absorption coated plate production method and vertical coating apparatus

Examples

Experimental program
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Effect test

Embodiment 1

[0050] Figure 1 to Figure 12 Figure 1 of this example is given. This embodiment introduces the method and device for depositing at least one group of "interference film stack" film system type solar heat absorbing coating plate film, the selected film system is substrate / Al infrared light reflection layer / AlN dielectric layer / stainless steel metal layer / AlN dielectric layer / stainless steel metal layer / AlN anti-reflection layer, including two sets of AlN / stainless steel interference film stacks, with 2000×1000×0.2mm aluminum as the substrate. see figure 1 , figure 2 , the present embodiment device comprises upper film area 1, front vacuum lock chamber 2, front holding chamber 3, continuous coating chamber 4, rear holding chamber 5, rear vacuum lock chamber 6, lower film area 7, slide rack 14 (referring to Figure 6 , Figure 7 ), there are pegs 15 on the carrier 14, a piece of metal substrate 16 is hung on both sides of the carrier, the round rod-shaped bottom 17 of the ...

Embodiment 2

[0060] Figure 3 ~ Figure 11 , Figure 13 , Figure 15 , Figure 16 Figure 2 of Embodiment 2 of the present invention is given. The present embodiment 2 is basically the same as the embodiment 1, and the difference is that the present embodiment mainly deposits Figure 13 A kind of solar energy heat-absorbing film plate of the " heat-absorbing semiconductor material film system " type of nitrogen oxide shown, the film system that selects is substrate 16 / Al infrared light reflection layer 18 / CrNiOyNx semiconductor absorption layer (heat-absorbing semiconductor material film) 34 / SiN anti-reflection layer 35, with an aluminum material of 2000×1000×0.2mm as the substrate. The transmission system, the transmission mechanism, the transmission mode of the substrate, the sputtering target and the structure of the corresponding sputtering chamber of the coating device are all the same as those in Example 1. Figure 3 ~ Figure 11 The structure and method shown are the same, but acc...

Embodiment 3

[0067] Figure 3 ~ Figure 11 , Figure 14 , Figure 17 , Figure 18 Figure 3 of Embodiment 3 of the present invention is given. The present embodiment 3 is basically the same as the embodiment 1, and the difference is that the present embodiment mainly deposits Figure 14 Shown " metal dielectric composite material film " (or be referred to as " metal-doped dielectric material ") type a kind of solar heat absorbing coating plate, the film system that needs to use is substrate 16 / Al infrared light reflective layer 18 / AlNx metal-dielectric composite material layer 36 / AlNy metal-dielectric composite material layer 37 / AlN anti-reflection layer 38, wherein the filling factor of Al in AlNx is higher than the filling factor of Al in AlNy, also adopting the same size of 2000×1000×0.2mm aluminum as the substrate.

[0068] In this embodiment, the transmission system, the transmission mechanism, the transmission mode of the substrate, the structure of the magnetron sputtering targe...

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Abstract

The invention provides a flat solar heat absorption coated plate production method. A large area sheet metal is used as a substrate; two sides of each sheet rack can be equipped with metal substrates; a speed reducer outside a vacuum chamber drags a transmission mechanism to drive sheet racks travel straight, and the sheet racks continuously enter into magnetic-control sputtering targets and corresponding sputtering cavities of a continuous coating chamber one by one with a uniform velocity, wherein each sputtering cavity is equipped with magnetic-control sputtering targets on two sides thereof, so that the metal substrates on two sides of a sheet rack can be deposited with films, such as an infrared light reflecting layer / a heat absorption function layer / an antireflection layer, in asolar heat absorption functional film The invention also provides a vertical coating apparatus for the flat solar heat absorption coated plate production. The apparatus includes sheet racks, a front vacuum lock chamber, a front hold chamber, a front buffer area, a continuous coating chamber, a back buffer area, a back hold chamber and a back lock chamber, so as to double the production efficiencyof a horizontal coating apparatus. The heat absorption coated plate of the invention has advantages of a high absorptivity and a low emissivity. In addition, high production efficiency and low costs can be realized through the present invention.

Description

Technical field: [0001] The invention relates to the field of solar light and heat utilization, in particular to a method for producing a flat solar heat absorbing coating plate and a vertical coating device. Background technique: [0002] Solar energy is a new energy source in the 21st century. Solar refrigeration, solar water heaters, solar power generation, and seawater purification are all important application fields. Selective heat-absorbing films have the performance advantages of high absorptivity in the visible-near-infrared region and high reflectivity in the infrared region, and their production methods and devices have become an important research direction for solar energy utilization technology. There are several types of production methods for solar selective heat absorbing films currently used, and they all have corresponding limitations: [0003] Glass tube vacuum tube type: the two ends of two glass tubes with different diameters are sealed together, and t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/56C23C14/35
Inventor 甘国工
Owner SICHUAN GOLDSTONE-ORIENT NEW MATERIAL TECH CO LTD
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