Preparation method of crystalline silicon solar cell
A technology of solar cells and crystalline silicon, applied in circuits, electrical components, semiconductor devices, etc., can solve the problems of wasting special gas flow, unable to adjust belt speed, and low output, so as to increase output, improve production efficiency, and save costs Effect
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Embodiment 1
[0012] Example 1, making a red solar cell. It includes the following steps:
[0013] (1) Texture and diffuse the raw silicon wafers; control the texturing depth at 0.2-1.0 μm, and control the diffusion as a shallow junction to be less than 0.1-0.2 μm;
[0014] (2), use PECVD equipment to coat silicon nitride antireflection film; adjust flow meter 1 and flow meter 3 respectively, control the ammonia gas entering U-shaped groove 1, U-shaped groove 2, U-shaped groove 3 and U-shaped groove 4 NH 3 and silane SIH 4 flow rate to make ammonia NH 3 and silane SIH 4 The flow ratio is 6:5; respectively adjust flow meter 2 and flow meter 4 to control the ammonia gas NH entering U-shaped groove 5, U-shaped groove 6, U-shaped groove 7 and U-shaped groove 8 3 and silane SIH 4 flow rate to make ammonia NH 3 and silane SIH 4 The flow ratio is 3: 1, 7: 2 or 4: 1, preferably 7: 2; adjust the flow meter 5 to control the hydrogen H entering the U-shaped groove 5 2 The flow rate is 200-300...
Embodiment 2
[0017] Embodiment 2, making a yellow solar battery sheet. It includes the following steps:
[0018] (1) Texture and diffuse the raw silicon wafers; control the texturing depth at 02-1.0 μm, and control the diffusion as a shallow junction to be less than 0.1-0.2 μm;
[0019] (2), use PECVD equipment to plate silicon nitride antireflection film; Regulate flowmeter 1 and flowmeter 3 respectively, control enters the ammonia in U-shaped groove], U-shaped groove 2, U-shaped groove 3 and U-shaped groove 4 NH 3 and silane SIH 4 flow rate to make ammonia NH 3 and silane SIH 4 The flow ratio is 6:5; respectively adjust flow meter 2 and flow meter 4 to control the ammonia gas NH entering U-shaped groove 5, U-shaped groove 6, U-shaped groove 7 and U-shaped groove 8 3 and silane SIH 4 flow rate to make ammonia NH 3 and silane SIH 4 The flow ratio is 3: 1, 7: 2 or 4: 1, preferably 4: 1; adjust the flow meter 5 to control the hydrogen H entering the U-shaped groove 5 2 The flow rate...
Embodiment 3
[0022] Embodiment 3, making green solar cells. It includes the following steps:
[0023] (1) Texture and diffuse the raw silicon wafers; control the texturing depth at 0.2-1.0 μm, and control the diffusion as a shallow junction to be less than 0.1-0.2 μm;
[0024] (2), use PECVD equipment to coat silicon nitride antireflection film; adjust flow meter 1 and flow meter 3 respectively, control the ammonia gas entering U-shaped groove 1, U-shaped groove 2, U-shaped groove 3 and U-shaped groove 4 NH 3 and silane SIH 4 flow rate to make ammonia NH 3 and silane SIH 4 The flow ratio is 6:5; respectively adjust flow meter 2 and flow meter 4 to control the ammonia gas NH entering U-shaped groove 5, U-shaped groove 6, U-shaped groove 7 and U-shaped groove 8 3 and silane SIH 4 flow rate to make ammonia NH 3 and silane SIH 4 The flow ratio is 3: 1, 7: 2 or 4: 1, preferably 3: 1; adjust the flowmeter 5 to control the hydrogen H entering the U-shaped groove 5 2 The flow rate is 200-...
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