Heating control system and method for polycrystalline silicon ingot furnace based on separate control of top and side
A heating control and heater technology, which is applied in the growth of polycrystalline materials, chemical instruments and methods, and temperature control by electric means, etc., can solve the problems of weakened heat dissipation effect, single heating effect change, and prolonged production time, etc. The effect of shortening the crystal growth time, good grain verticality, and improved crystal quality
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[0032] The present invention will be further described below in conjunction with the drawings.
[0033] The heating control system based on separate control of the top side of the polysilicon ingot furnace includes: an insulated cage 5 placed in the furnace chamber 3, a crucible 8 and a heat exchange table 9 are placed on a support column, and a side heater is arranged around the crucible 8 7 and the side heater temperature sensor 12, the top heater 6 and the top heater temperature sensor 13 are provided on the top, the water cooling jacket of the furnace chamber 3 is provided with a lower water temperature flow sensor 10 and a side water temperature flow sensor 11; the side heater 7 Connected to the side power supply 1, the top heater 6 is connected to the top power supply 2, the side power supply 1 and the top power supply 2 are connected to the power distribution control module 21 through wires, and the power distribution control module 21 is electrically connected to the centr...
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