Heating control system and method for polycrystalline silicon ingot furnace based on separate control of top and side
A heating control and heater technology, which is applied in the growth of polycrystalline materials, chemical instruments and methods, and temperature control by electric means, etc., can solve the problems of weakened heat dissipation effect, single heating effect change, and prolonged production time, etc. The effect of shortening the crystal growth time, good grain verticality, and improved crystal quality
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[0032] The present invention will be further described below in conjunction with accompanying drawing.
[0033] The heating control system based on separate control of the top and side of the polysilicon ingot casting furnace includes: a heat-insulating cage 5 placed in the furnace chamber 3, a crucible 8 and a heat exchange table 9 placed on the support column, and side heaters are arranged around the crucible 8 7 and side heater temperature sensor 12, the top is provided with top heater 6 and top heater temperature sensor 13, and the water cooling jacket of furnace chamber 3 is provided with lower water temperature flow sensor 10 and side water temperature flow sensor 11; Said side heater 7 Connected to the side power supply 1, the top heater 6 is connected to the top power supply 2, the side power supply 1 and the top power supply 2 are connected to the power distribution control module 21 through wires, and the power distribution control module 21 is respectively electrical...
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