Nano polyaniline composite surface acoustic wave humidity sensor and manufacturing method thereof

A nano-polyaniline, humidity sensor technology, applied in the process of producing decorative surface effects, using sonic/ultrasonic/infrasonic waves to analyze fluids, and manufacturing microstructure devices, etc. Insufficient research on humidity sensing elements, etc., to achieve the effects of good response linearity, improved response sensitivity, and high response sensitivity

Inactive Publication Date: 2011-12-28
ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the current research on surface acoustic wave humidity sensor based on polymer sensi

Method used

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  • Nano polyaniline composite surface acoustic wave humidity sensor and manufacturing method thereof
  • Nano polyaniline composite surface acoustic wave humidity sensor and manufacturing method thereof
  • Nano polyaniline composite surface acoustic wave humidity sensor and manufacturing method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0030] 1) Clean the surface photolithography and evaporate the ceramic substrate with interdigitated gold electrodes, and dry it for later use;

[0031] 2) Prepare an aqueous solution of polystyrene sulfonic acid with a concentration of 0.1 g / ml, add aniline to it, and add 4 ml of aniline per liter of polystyrene sulfonic acid aqueous solution, at -20 ? Stir at C for 1 hour, then add an aqueous solution with a concentration of 0.05 g / ml ammonium persulfate, the volume ratio of polystyrene sulfonic acid aqueous solution to ammonium persulfate aqueous solution is 1: 1, after stirring and mixing, let stand for 12 hours, and use acetone precipitation, suction filtration, washing with acetone, and vacuum drying at room temperature to obtain polyaniline nanoparticles;

[0032] 3) Prepare the polyaniline nanoparticles prepared in step 2) into an aqueous solution with a concentration of 15 mg / ml, and mix it with an aqueous solution of polyvinyl alcohol with a concentration of 15 mg / ml...

Embodiment 2

[0036] 1) Clean the surface photolithography and evaporate the ceramic substrate with interdigitated gold electrodes, and dry it for later use;

[0037] 2) Prepare an aqueous solution of polystyrene sulfonic acid with a concentration of 0.5 g / ml, add aniline to it, and add 15 ml of aniline per liter of polystyrene sulfonic acid aqueous solution, at -10 ? Stir at C for 2 hours, then add an aqueous solution with a concentration of 0.1 g / ml ammonium persulfate, the volume ratio of polystyrene sulfonic acid aqueous solution to ammonium persulfate aqueous solution is 1: 1.5, after stirring and mixing, let it stand for 16 hours, and use acetone precipitation, suction filtration, washing with acetone, and vacuum drying at room temperature to obtain polyaniline nanoparticles;

[0038] 3) The polyaniline nanoparticles prepared in step 2) are configured into an aqueous solution with a concentration of 20 mg / ml, and mixed with an aqueous solution of polyvinyl alcohol with a concentration...

Embodiment 3

[0042] 1) Clean the surface photolithography and evaporate the ceramic substrate with interdigitated gold electrodes, and dry it for later use;

[0043] 2) Prepare an aqueous solution of polystyrene sulfonic acid with a concentration of 1.5 g / ml, add aniline to it, and add 20 ml of aniline per liter of polystyrene sulfonic acid aqueous solution, at 0 ? Stir at C for 3 hours, then add an aqueous solution with a concentration of 0.15 g / ml ammonium persulfate, the volume ratio of polystyrene sulfonic acid aqueous solution to ammonium persulfate aqueous solution is 1: 2, after stirring and mixing, let it stand for 20 hours, and use acetone precipitation, suction filtration, washing with acetone, and vacuum drying at room temperature to obtain polyaniline nanoparticles;

[0044] 3) The polyaniline nanoparticles prepared in step 2) are configured into an aqueous solution with a concentration of 25 mg / ml, and mixed with an aqueous solution of polyvinyl alcohol with a concentration of...

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Abstract

The nano polyaniline composite surface acoustic wave humidity sensor disclosed by the invention is composed of an interdigitated gold electrode element covered with a polymer nano humidity sensitive film and a vacuum-packed surface acoustic wave resonant element connected in series. It is prepared by a solution dipping process, and the preparation method is simple and the cost is low. The humidity sensor of the invention has the characteristics of wide humidity response range, high humidity sensitivity, fast response, good recovery, strong stability, and can be detected at room temperature. Especially in the low humidity range (relative humidity 4%~20%), it also has high response sensitivity and good response linearity, which can realize humidity detection in low humidity and dry environment. It can be widely used in many fields such as industrial and agricultural production process, medicine, warehousing, power system insulation medium monitoring, atmospheric environment monitoring, etc., to realize accurate measurement and control of environmental humidity.

Description

technical field [0001] The invention relates to a humidity sensor and a manufacturing method thereof, in particular to a surface acoustic wave type humidity sensor using nano polyaniline and polyvinyl alcohol compound as a sensitive material and a manufacturing method thereof. Background technique [0002] Humidity detection plays an increasingly important role in modern industrial and agricultural production and environmental monitoring. As the most commonly used and effective method for detecting humidity, the research of humidity sensor has been paid more and more attention by various countries. There are many ways to classify humidity sensors. According to its detection principle, it can be divided into resistive type, capacitive type, surface acoustic wave type, optical fiber type, quartz vibrator type, etc., and according to the classification of humidity-sensitive response materials used in humidity sensors, it can be mainly divided into inorganic semiconductor ceram...

Claims

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Application Information

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IPC IPC(8): G01N29/036B81C1/00
Inventor 李扬邓超杨慕杰
Owner ZHEJIANG UNIV
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