Monocrystalline silicon wafer etching auxiliary, as well as preparation and using method thereof

Abstract

The invention relates to a monocrystalline silicon wafer etching auxiliary for a solar cell, an alkaline etching agent containing the etching auxiliary, and an etching method of a monocrystalline silicon wafer for the solar cell by using the etching auxiliary or the alkaline etching agent. When the monocrystalline silicon wafer for the solar cell is subjected to surface etching, the etching auxiliary in the invention is added into alkaline solution, and is not required to be refilled massively in an etching process, so that an excellent etching effect is achieved. The etching auxiliary has no toxicity, no corrosion, no irritation, no combustion or explosion hazard, and is harmless to human bodies and environment; and the preparation and using process of the etching agent is simple, the equipment has low cost, and the repeatability is good.

Description

technical field

[0001] The invention relates to a monocrystalline silicon wafer texturing auxiliary for solar cells, an alkaline texturing agent containing the texturing auxiliary, and the use of the texturing auxiliary or alkaline texturing agent for monocrystalline silicon wafers for solar cells The method of making velvet. Background technique

[0002] In the process of preparing solar cells, in order to improve the performance and efficiency of solar cells, it is necessary to make a textured surface on the surface of the silicon wafer. The effective textured structure can make the incident sunlight reflect and refract multiple times on the surface of the silicon wafer, changing the incident light. The way forward in silicon. On the one hand, the optical path is extended, thereby increasing the absorption rate of infrared light by the silicon wafer; on the other hand, more photons are absorbed in the area near the pn junction to generate photo-generated carriers, and the...

Examples

Embodiment 1

[0013] Take the following process steps:

[0014] 1) Preparation of texturing aids: 20 ml of benzyl alcohol and 30 ml of triethanolamine were added to a 1000 ml volumetric flask, and then deionized water was added to obtain a 1000 ml solution.

[0015] 2) Prepare lye: dissolve 11 grams of sodium hydroxide in 989 grams of deionized water to obtain a 1.1% sodium hydroxide deionized aqueous solution by weight.

[0016] 3) Preparation of alkaline texturizing agent: the volume ratio of texturing auxiliary agent: lye is 1.5: 100, and the texturizing auxiliary agent is added to the lye to obtain the alkaline texturizing agent.

[0017] 4) Texturing: the monocrystalline silicon wafer for solar cells is immersed in the above alkaline texturing agent for surface texturing, the texturing temperature is 80°C, and the texturing time is 800s.

[0018] figure 1 A scanning electron microscope plane photo of the textured surface of the obtained silicon wafer is given. From the figure, it can...

Embodiment 2

[0020] 1) Preparation of texturing aids: 10 ml of benzyl alcohol and 40 ml of triethanolamine were added to a 1000 ml volumetric flask, and then deionized water was added to obtain a 1000 ml solution.

[0021] 2) Prepare lye: dissolve 8 grams of sodium hydroxide in 992 grams of deionized water to obtain a 0.8% sodium hydroxide deionized aqueous solution by weight.

[0022] 3) Preparation of alkaline texturizing agent: the volume ratio of texturizing auxiliary agent: lye solution is 0.5:100, and the texturizing auxiliary agent is added to the alkali solution to obtain the alkaline texturizing agent.

[0023] 4) Texturing: the monocrystalline silicon wafer for solar cells is immersed in the above-mentioned alkaline texturing agent for surface texturing, the texturing temperature is 85°C, and the texturing time is 720s.

[0024] In addition, no significant volatilization of components in the texturizing agent was observed in Example 1 and Example 2 of the present invention.

technical field

[0001] The invention relates to a monocrystalline silicon wafer texturing auxiliary for solar cells, an alkaline texturing agent containing the texturing auxiliary, and the use of the texturing auxiliary or alkaline texturing agent for monocrystalline silicon wafers for solar cells The method of making velvet. Background technique

[0002] In the process of preparing solar cells, in order to improve the performance and efficiency of solar cells, it is necessary to make a textured surface on the surface of the silicon wafer. The effective textured structure can make the incident sunlight reflect and refract multiple times on the surface of the silicon wafer, changing the incident light. The way forward in silicon. On the one hand, the optical path is extended, thereby increasing the absorption rate of infrared light by the silicon wafer; on the other hand, more photons are absorbed in the area near the pn junction to generate photo-generated carriers, and the...

Examples

Embodiment 1

[0013] Take the following process steps:

[0014] 1) Preparation of texturing aids: 20 ml of benzyl alcohol and 30 ml of triethanolamine were added to a 1000 ml volumetric flask, and then deionized water was added to obtain a 1000 ml solution.

[0015] 2) Prepare lye: dissolve 11 grams of sodium hydroxide in 989 grams of deionized water to obtain a 1.1% sodium hydroxide deionized aqueous solution by weight.

[0016] 3) Preparation of alkaline texturizing agent: the volume ratio of texturing auxiliary agent: lye is 1.5: 100, and the texturizing auxiliary agent is added to the lye to obtain the alkaline texturizing agent.

[0017] 4) Texturing: the monocrystalline silicon wafer for solar cells is immersed in the above alkaline texturing agent for surface texturing, the texturing temperature is 80°C, and the texturing time is 800s.

[0018] figure 1 A scanning electron microscope plane photo of the textured surface of the obtained silicon wafer is given. From the figure, it can...

Embodiment 2

[0020] 1) Preparation of texturing aids: 10 ml of benzyl alcohol and 40 ml of triethanolamine were added to a 1000 ml volumetric flask, and then deionized water was added to obtain a 1000 ml solution.

[0021] 2) Prepare lye: dissolve 8 grams of sodium hydroxide in 992 grams of deionized water to obtain a 0.8% sodium hydroxide deionized aqueous solution by weight.

[0022] 3) Preparation of alkaline texturizing agent: the volume ratio of texturizing auxiliary agent: lye solution is 0.5:100, and the texturizing auxiliary agent is added to the alkali solution to obtain the alkaline texturizing agent.

[0023] 4) Texturing: the monocrystalline silicon wafer for solar cells is immersed in the above-mentioned alkaline texturing agent for surface texturing, the texturing temperature is 85°C, and the texturing time is 720s.

[0024] In addition, no significant volatilization of components in the texturizing agent was observed in Example 1 and Example 2 of the present invention.

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