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Perpendicular magnetic recording medium and manufacturing method of the same

A technology of perpendicular magnetic recording and manufacturing method, which is applied in magnetic recording, data recording, disc carrier manufacturing, etc. It can solve the problems of poor vertical orientation, high order degree and high perpendicular magnetic anisotropy energy, etc., and achieve high effect of order

Inactive Publication Date: 2012-03-21
HITACHI LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0014] As mentioned above, in the case of high-speed production of FePt granular media, there is a problem that it is more difficult to obtain a high degree of order and high perpendicular magnetic anisotropy energy without increasing the particle size.
In addition, in the case of increasing the amount of material added as a grain boundary in order to reduce the crystal grain size, there is a problem that the vertical orientation deteriorates.

Method used

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  • Perpendicular magnetic recording medium and manufacturing method of the same
  • Perpendicular magnetic recording medium and manufacturing method of the same
  • Perpendicular magnetic recording medium and manufacturing method of the same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0062] made with Figure 1A A schematic cross-sectional view of a perpendicular magnetic recording medium is shown in . The perpendicular magnetic recording medium of this example was produced using a continuous high-speed sputtering device (C3010) manufactured by Canon ANELVA. This equipment is composed of a plurality of process chambers for film formation, a dedicated heating chamber, and a substrate introduction / discharge chamber, and each chamber is independently exhausted. Before making the perpendicular magnetic recording medium of this embodiment, all chambers are exhausted until 8×10 -6 Vacuum degree below Pa. The process is performed sequentially by moving the carrier on which the substrate is mounted to each process chamber. In addition, the heating of the substrate was carried out in a dedicated heating chamber, and was carried out from both sides of the substrate using a PBN (Pyrolytic boron nitride: pyrolytic boron nitride) heater. The heating rate of the heate...

Embodiment 2

[0078] The perpendicular magnetic recording medium of this example was produced under the same film configuration and film formation conditions as in Example 1 except for the magnetic recording layer. In the present embodiment, through four-stage film-making ( figure 2 N=4 in the film forming method shown) The magnetic recording layer 4 was produced by changing the compositions of the first to fourth magnetic recording layers. All the thicknesses of the first to fourth magnetic recording layers were 1.5 nm. In addition, the samples were prepared under the condition that the heating temperature in the heating chamber was 500° C., and the heating time was 1 minute.

[0079] Table 2 shows the results of evaluating the composition, degree of order, crystal grain size, and vertical orientation of each magnetic recording layer of the prepared samples. In Table 2, for example, when expressed as (45 atomic % Fe-45 atomic % Pt-10 atomic % Ag)-30 atomic % C (22 volume % C), it means ...

Embodiment 3

[0084] The perpendicular magnetic recording medium of this example was produced under the same film configuration and film formation conditions as Samples 2-3 and 2-4 of Example 2 except for the film thickness of the first magnetic recording layer.

[0085] Sample series 3-1 of this example is a sample series in which the film thickness of the first magnetic recording layer of sample 2-3 of example 2 was changed. In addition, sample series 3-2 of this example is a sample series in which the film thickness of the first magnetic recording layer of sample 2-4 of example 2 was changed. The X-ray diffraction of the prepared sample series is measured, and the integrated intensity ratio I of the FePt(001) diffraction peak and the FePt(111) diffraction peak is (111) / I (001)Make an evaluation. In addition, the measurement of the crystal grain size was performed using TEM. Show the respective results in Figure 5A , Figure 5B .

[0086] From this, it can be seen that when the fi...

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Abstract

A perpendicular magnetic recording medium having sufficient perpendicular uniaxial magnetic anisotropy energy and a crystal grain size for realizing an areal recording density of one terabit or more per one square centimeter, and excellent in mass productivity, and a manufacturing method of the same are provided. On a substrate, a substrate-temperature control layer, an underlayer and a magnetic recording layer are sequentially formed. The magnetic recording layer is formed by repeating a magnetic layer stacking step N times (N>=2), which includes a first step of heating the substrate in a heat process chamber, and a second step of depositing, in a deposition process chamber, the magnetic recording layer constituted of an alloy mainly composed of FePt to which at least one kind of non-magnetic material selected from a group constituted of C and an Si oxide is added.

Description

technical field [0001] The present invention relates to perpendicular magnetic recording media, in particular to recording media with 1 trillion bits (Terabit) / cm 2 A magnetic recording medium having the above areal recording density and a method for producing the same. Background technique [0002] In order to achieve a higher areal recording density while maintaining thermal stability, it is necessary to have a high perpendicular magnetic anisotropy energy K u magnetic recording layer. L1 0 Compared with the existing CoCrPt alloys, FePt-type ordered lattice structure alloys (also known as regular alloys) have high perpendicular magnetic anisotropy energy K u The material is attracting attention as a next-generation magnetic recording layer material (for example, IEEE Trans. Magn., 36, p.10, (2000)). In order to put the L1 0 FePt-type FePt ordered lattice structure alloy is used as a magnetic recording layer, and it is necessary to reduce the exchange interaction betwe...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G11B5/66
CPCG11B5/84G11B5/66G11B5/65G11B5/672
Inventor 武隈育子中村公夫佐山淳一根本广明
Owner HITACHI LTD
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