Method for preparing high efficiency solar cell with stereostructure

A solar cell and three-dimensional structure technology, applied in circuits, photovoltaic power generation, electrical components, etc., can solve problems such as low conversion efficiency, high price, and limited capacity, and achieve high conversion efficiency, large short-circuit current, and improved efficiency.

Inactive Publication Date: 2012-06-06
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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Problems solved by technology

[0004] Although crystalline silicon cells have disadvantages such as low conversion efficiency (large-scale mass production can reach 17%) and high prices, crystalline silicon cells still account for more than 90% of the market share, so the reduction of power generation costs depends on raw materials In addition to price, it is more impo

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  • Method for preparing high efficiency solar cell with stereostructure
  • Method for preparing high efficiency solar cell with stereostructure
  • Method for preparing high efficiency solar cell with stereostructure

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[0043] In order to make the objectives, technical solutions, and advantages of the present invention clearer, the following further describes the present invention in detail in conjunction with specific embodiments and with reference to the accompanying drawings.

[0044] Such as figure 1 As shown, figure 1 This is a flowchart of a method for preparing a three-dimensional structure high-efficiency solar cell provided by the present invention. The method includes the following steps:

[0045] Step 1: Thermally oxidize the crystalline silicon cell to form SiO on the surface 2 film;

[0046] Step 2: To cover SiO 2 The thin-film crystalline silicon cells are laser-grooved, and the crystalline silicon cells are cut into a structure perpendicular to the surface and connected to each other in a "tower-like" structure;

[0047] Step 3: Use an alkaline solution to remove the damage on the surface of the crystalline silicon cell;

[0048] Step 4: Use an acidic solution to neutralize the excess al...

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Abstract

The invention discloses a method for preparing a high efficiency solar cell with a stereostructure. The method comprises the followings steps that: thermal oxidation is carried out on a crystalline silicon cell so as to form a SiO2 film; laser grooving is carried out on the crystalline silicon cell and thus the crystalline silicon cell is etched into a structure with a ''towering building shape'', wherein the structure is formed in a direction vertical to the surface and the towering buildings are mutually connected; an alkaline solution is employed to remove damages on the surface of the crystalline silicon cell; an acid solution is employed to neutralize surplus alkali so as to remove oxide on the surface of the crystalline silicon cell; texturing is carried out on the surface of the crystalline silicon cell to form a nanopillar structure; diffusion is carried out on the surface of the crystalline silicon cell to form a PN node as well as phosphosilicate glass that is formed during the diffusion process is removed; oxidation is carried out on the surface of the crystalline silicon cell and then a SiN film is deposed and surface passivation is carried out to form a composite attenuated layer; an aluminium back field is printed and laser sintering is carried out on an aluminium electrode; and screen printing or evaporation is carried out on a metal electrode at the other surface of the crystalline silicon cell and then electrode alloying is carried out to form a high efficiency solar cell with a stereostructure. According to the invention, conversion efficiency of a solar cell is improved.

Description

technical field [0001] The invention relates to the technical field of solar cell preparation, in particular to a method for preparing a three-dimensional structure high-efficiency solar cell, which uses a laser to improve the efficiency of a crystalline silicon solar cell, divides the battery sheet into a "building shape", prepares a three-dimensional structure solar cell, and improves the efficiency of the solar cell. light trapping performance. Background technique [0002] In order to meet the growing living needs of human beings, the demand for energy is increasing, and the exploitation and utilization of energy is intensifying. Fossil energy reserves such as oil and coal are limited and will soon be exhausted. Due to the exploitation and utilization of fossil energy, it has caused great damage to the earth environment on which human beings depend, and directly threatens the survival of human beings. Therefore, it is extremely urgent to find new energy sources to solv...

Claims

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Application Information

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IPC IPC(8): H01L31/18H01L31/04H01L31/0352
CPCY02B10/10Y02E10/50Y02P70/50
Inventor 武德起贾锐陈晨李昊峰吴大卫刘新宇叶甜春
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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