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Sol-gel preparation method of strontium titanate lead thin film

The technology of lead strontium titanate and sol-gel is applied in the field of preparation of functional dielectric films, which can solve the problems of long storage time and poor dielectric tuning performance, and achieve the effects of high preparation efficiency, inhibition of hydrolysis and low temperature

Inactive Publication Date: 2014-09-03
CHINA THREE GORGES UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

It can be seen that, on the one hand, the dielectric tuning performance of the PST films currently prepared is far worse than that of ceramics, and on the other hand, the preparation process of PST films also needs to be improved in terms of environmental protection.
In addition, in the actual preparation process of PST sol-gel, how to prepare a sol with no impurity phase at low temperature, a long storage time, a good uniformity of gel rejection, and a film with good dielectric tuning performance still need to be further solved. aspect

Method used

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  • Sol-gel preparation method of strontium titanate lead thin film

Examples

Experimental program
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Effect test

Embodiment 1

[0019] Example 1: No Miscellaneous Strontium Titanate Lead Pb 0.3 Sr 0.7 TiO 3 Sol preparation

[0020] 7.51g of strontium acetate [Sr(CH 3 COO) 2 ] and 5.97g of lead acetate trihydrate [ Pb(CH 3 COO) 2 ·3H 2 O] dissolve the mixed solution of deionized water and glacial acetic acid to obtain solution A; then dissolve the tetrabutyl titanate of 17.5g in ethylene glycol methyl ether, stir and mix evenly to obtain solution B; pour solution B into In solution A, add acetylacetone, formamide and glycerol in a volume ratio of 2~4:1.4~2.2:1.5~2.1 in sequence, stir evenly, heat to 90°C for 1 hour, and filter to obtain a clear and transparent precursor body sol. Such as figure 1 The strontium lead titanate sol stored for 3 months is still clear and transparent.

[0021] Pour a small amount of strontium lead titanate Pb 0.3 Sr 0.7 TiO 3 The sol was put into a dry pot and calcined at 750°C for 1 hour to obtain a white powder. Use XRD to do the phase test of the powder, s...

Embodiment 2

[0022] Example 2: Strontium lead titanate Pb 0.3 Sr 0.7 TiO 3 thin film preparation and its dielectric tuning properties

[0023] The prepared Pb 0.3 Sr 0.7 TiO 3 After the precursor sol was aged for 1~2 weeks, the Pt / Ti / SiO 2 / Si substrate was prepared by spin-coating at a speed of 4000 rpm for 25 seconds; then the coated film was annealed at 700°C for 0.5h; the process of "spin coating-annealing" was repeated several times to obtain the desired thickness of strontium lead titanate film.

[0024] Using magnetron sputtering equipment on Pt / Ti / SiO 2 / Pb on Si substrate 0.3 Sr 0.7 TiO 3 The Au top electrode was prepared on the film to form a plate capacitor, and the dielectric tuning performance was tested with Aginengt 4294A. Such as image 3 As shown, the film has excellent dielectric tuning performance: the tuning amount is 66.4%, and the dielectric loss is 0.029.

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Abstract

A sol-gel preparation method of a high-tuning strontium lead titanate thin film, using tetrabutyl titanate, lead acetate trihydrate, and strontium acetate as raw materials, and ethylene glycol methyl ether and acetic acid as solvents to prepare a strontium lead titanate sol precursor body. The thin film was prepared on the substrate by spin-coating method and annealed, repeated several times to obtain the strontium lead titanate ferroelectric thin film. The strontium lead titanate thin film prepared by the invention is dense, uniform in particle size, good in quality, and has no unknown second phase, and the obtained strontium lead titanate thin film has high adjustability, the whole set of process is simple, the cycle is relatively short, saving It saves time and cost, provides a new method for preparing high-performance strontium lead titanate thin film, and has a good market application prospect.

Description

technical field [0001] The invention relates to a preparation method of a functional dielectric film, which belongs to the field of ferroelectric film materials and the field of preparation of electronic components, in particular to a method for preparing a strontium lead titanate film by a sol-gel method. Background technique [0002] Lead strontium titanate (PST) ferroelectric material has the characteristics of high dielectric constant, low dielectric loss, large tuning rate, fast response speed, and its Curie temperature can be adjusted with Pb / Sr, so it is considered It is an ideal material for microwave tunable devices and dynamic random memory devices. Cross (see Yoshitaka Somiya, Amar S. Bhalla, L, Erie Cross, International Journal of Inorganic Materials 3 (2001) 709-714) of the University of Pennsylvania Cross (see Yoshitaka Somiya, Amar S. Bhalla, L, Erie Cross, International Journal of Inorganic Materials 3 (2001) 709-714) and others have carried out research on s...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B32B9/00C04B35/47C04B35/622
Inventor 孙小华李修能周生刚侯爽罗志猛
Owner CHINA THREE GORGES UNIV
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