Preparation method of high-purity sintered alumina for monocrystal sapphire growth
A high-purity alumina and sintered body technology, applied in the direction of single crystal growth, single crystal growth, crystal growth, etc., can solve the problems of low equipment cost and high production efficiency, and achieve low equipment cost, high production efficiency and low defect density. Effect
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Embodiment 1
[0027] The entire production process is carried out in a dust-free workshop with a cleanliness level above 1000.
[0028] Take 30kg of high-purity alumina with a purity of 99.999% (the content of impurities Fe3 , Alumina particles with a purity of 99.9996%, packed in polyethylene plastic bags.
[0029] Such as figure 1 , figure 2 As shown, take 3kg of the prepared alumina particles and put them into a material crucible 2 with an inner diameter of 225mm×340mm. The material crucible 2 is a ceramic crucible sintered by 99.99% alumina, and the material crucible 2 is placed in a water-cooled copper crucible. 3, a copper coil 1 of a high-frequency plasma heating device is installed on the water-cooled copper crucible 3, and the high-frequency plasma heating device is composed of a high-frequency power supply 4, a plasma generator 5 and a copper coil 1, wherein the material of the copper coil 1 is copper , the number of turns is 3 turns, and the copper coil 1 is cooled by deionize...
Embodiment 2
[0032] The entire production process is carried out in a dust-free workshop with a cleanliness level above 1000.
[0033] Take 30kg of high-purity alumina with a purity of 99.999% (the content of impurities Fe3 , Alumina particles with a purity of 99.9993%, packed in polyethylene plastic bags.
[0034]Get 3kg of prepared alumina granules and put them into a material crucible 2 with an inner diameter of 225 mm * 340 mm. The material crucible 2 is a ceramic crucible sintered by 99.99% alumina, and the material crucible 2 is placed in a water-cooled copper crucible 3. A copper coil 1 of a high-frequency plasma heating device is installed on the water-cooled copper crucible 3, and the high-frequency plasma heating device is composed of a high-frequency power supply 4, a plasma generator 5 and a copper coil 1, wherein the material of the copper coil 1 is red copper, and the copper coil The number of turns of 1 is 2 turns, and the copper coil 1 is cooled by deionized water with a co...
Embodiment 3
[0037] The entire production process is carried out in a dust-free workshop with a cleanliness level above 1000.
[0038] Take 30kg of high-purity alumina with a purity of 99.999% (the content of impurities Fe3 , Alumina particles with a purity of 99.9997%, packed in polyethylene plastic bags.
[0039] Put 3kg of the prepared alumina particles into a material crucible 2 with an inner diameter of 225mm×340mm. The material crucible 2 is a ceramic crucible sintered with 99.99% alumina, and the material crucible 2 is placed in a water-cooled copper crucible 3. A copper coil 1 of a high-frequency plasma heating device is installed on the water-cooled copper crucible 3, and the high-frequency plasma heating device is composed of a high-frequency power supply 4, a plasma generator 5, and a copper coil 1, wherein the material of the copper coil 1 is red copper, and the copper coil The number of turns of 1 is 1 turn, and the copper coil 1 is cooled by deionized water with a conductivit...
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