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Reflective anode electrode for organic EL display

A reflective anode and display technology, applied in applications, instruments, circuits, etc., can solve the problem of high power consumption, and achieve the effects of low contact resistance, excellent luminous brightness characteristics, alkali corrosion resistance and heat resistance.

Inactive Publication Date: 2012-07-25
KOBE STEEL LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The details of the reason are unknown, but when the work function on the surface of the ITO film decreases by about 0.1 to 0.2 eV, the emission initiation voltage (threshold value) of the organic light-emitting layer formed on the ITO film is shifted to the high voltage side by several V Left and right, when maintaining the same luminous intensity, there is a problem of high power consumption

Method used

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  • Reflective anode electrode for organic EL display
  • Reflective anode electrode for organic EL display
  • Reflective anode electrode for organic EL display

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0088] In this example, various Al alloy reflective films were used to study the effects on work function, reflectivity and resistivity without heat treatment (Group A, Table 1) or with post-annealing (Group B, Table 2) , In addition, the influence on heat resistance, which is a preferred characteristic, was also studied.

[0089] Specifically, first, an alkali-free glass plate (thickness: 0.7 mm) was used as a substrate, and a SiN film (thickness: 300 nm) was formed as a passivation film on the surface thereof using a plasma CVD apparatus. The film-forming conditions are: substrate temperature: 280°C, gas ratio: SiH 4 / NH 3 / N 2 =125 / 6 / 185, pressure: 137Pa, RF power: 100W. Further, on the surface, an Al alloy film (film thickness: about 100 nm) was formed as a reflective film by a sputtering method. The composition of the Al alloy film is shown in Table 1 and Table 2. In addition, the film formation conditions were substrate temperature: 25° C., pressure: 2 mTorr, and DC...

Embodiment 2

[0125] In this example, using an Al alloy reflective film with the same composition as in Example 1, it is studied when performing preliminary annealing and alkali solution treatment (group C, Table 3) or when performing preliminary annealing, alkali solution treatment and post-annealing (group D , Table 4), its effect on work function, reflectivity, resistivity and contact resistance, and also its effect on heat resistance and alkali corrosion resistance which are preferred characteristics.

[0126] First, each reflective film was formed in the same manner as in Example 1 described above. Next, the formed reflective films were classified into Group C and Group D. In Group C, after heat treatment (preliminary annealing) at 250° C. for 30 minutes in a nitrogen atmosphere, tetramethanone at a concentration of 0.4% by mass was used as an alkaline solution. Ammonium Hydroxide (TMAH) aqueous solution, alkaline solution treatment (TMAH treatment), immersion for 20 seconds, the same ...

Embodiment 3

[0148] In this example, the influence of the film thickness of the ITO film on the reflectance was investigated.

[0149] In detail, after forming each reflective film similarly to Example 1 mentioned above, it classified into A group and B group, and performed the same process as Example 1. In addition, the film thickness of the ITO film was changed to 5 to 50 nm by changing the film formation time of sputtering. In addition, for comparison, the same treatment was performed on pure Al and Al-0.6 atomic % Nd simulated in Patent Document 1.

[0150] Regarding the reflective anode electrode thus obtained, the reflectance was measured and evaluated in the same manner as in Example 1. These results are described in Table 5 and Table 6 together.

[0151] 【table 5】

[0152]

[0153] *: Unit of composition: atomic %, balance: Al and unavoidable impurities

[0154] 【Table 6】

[0155]

[0156] *: Unit of composition: atomic %, balance: Al and unavoidable impurities

[0157]...

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Abstract

Disclosed is a reflective anode electrode for an organic EL display, which comprises a novel Al-based alloy reflective film. The reflective anode electrode is capable of assuring low contact resistance and high reflectance even in cases where the Al reflective film is in direct contact with an oxide conductive film such as an ITO or IZO film. In addition, when the Al reflective film is formed into a laminated structure together with the oxide conductive film, the work function of the surface of the upper oxide conductive film is equally high with the work function of a laminated structure that is composed of a general-purpose Ag-based alloy film and an oxide conductive film. Specifically disclosed is a reflective anode electrode for an organic EL display, which is formed on a substrate and characterized by comprising a laminated structure that is composed of an Al-based alloy film containing 0.1-6% by atom of Ag and an oxide conductive film that is formed on the Al-based alloy film so as to be in direct contact with the Al-based alloy film

Description

technical field [0001] The present invention relates to a reflective anode electrode used in an organic EL display (especially a top emission type). Background technique [0002] Organic electroluminescence (hereinafter referred to as "organic EL") display, one of self-luminous flat panel displays, is an all-solid-state type in which organic EL elements are arranged in a matrix on a substrate such as a glass plate. flat panel display. In an organic EL display, an anode (positive electrode) and a cathode (negative electrode) are formed in stripes, and the intersecting portions correspond to pixels (organic EL elements). By applying a voltage of several volts to the organic EL element from the outside and passing a current, the organic molecules are pushed into an excited state, and when they return to the original ground state (stable state), the remaining energy is emitted as light. Its luminous color is inherent to organic materials. [0003] Organic EL elements are self...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05B33/26C22C21/00C23C14/34G09F9/30H01L27/32H01L51/50
CPCH01L51/5271H01L51/5218H05B33/28C23C14/185C22C21/00C23C14/3414H05B33/26H10K59/80518H10K59/878Y10S428/917H10K50/818H10K50/856
Inventor 岩成裕美钉宫敏洋平野贵之前田刚彰
Owner KOBE STEEL LTD
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