Method for preparing target for copper conductor of thin film transistor (TFT)-liquid crystal display (LCD) array substrate, and target

An array substrate and copper wire technology, applied in the field of sputtering targets, can solve problems such as unfavorable improvement in the quality of TFT-LCD array substrates, difficulty in controlling grain orientation, etc., and achieve high relative density, low film stress, and simple process. Effect

Inactive Publication Date: 2012-10-03
SHENZHEN CHINA STAR OPTOELECTRONICS TECH CO LTD
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Problems solved by technology

[0006] The existing target material manufacturing process is generally: sintering→hot rolling/hot extrusion molding→annealing recovery recrystallization→machining, etc.; this process is not easy to control the crystal grains during hot rolling/hot extrusion molding and annealing recovery recrystallization Orientation, it is not easy to produce preferred cryst

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  • Method for preparing target for copper conductor of thin film transistor (TFT)-liquid crystal display (LCD) array substrate, and target
  • Method for preparing target for copper conductor of thin film transistor (TFT)-liquid crystal display (LCD) array substrate, and target
  • Method for preparing target for copper conductor of thin film transistor (TFT)-liquid crystal display (LCD) array substrate, and target

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Embodiment Construction

[0033] In order to further illustrate the technical means adopted by the present invention and its effects, a detailed description is given below in conjunction with the preferred embodiments of the present invention and the accompanying drawings.

[0034] see Figure 2 to Figure 6 The present invention provides a method for preparing a target material for copper wires of a TFT-LCD array substrate, the method comprising the following steps:

[0035] Step 1. Provide copper powder and a spark plasma activation sintering device.

[0036] The quality of the copper powder is calculated according to the area and thickness of the copper thin film formed by predetermined sputtering. The purity of the copper powder can be specifically determined according to the properties of the copper film to be prepared. In this embodiment, the purity of the copper powder is 99.99%.

[0037] Step 2, adding the copper powder into a discharge plasma activation sintering device for sintering to prepa...

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Abstract

The invention relates to a method for preparing a target for a copper conductor of a thin film transistor (TFT)-liquid crystal display (LCD) array substrate, and the target. The method for preparing the target for the copper conductor for the TFT-LCD array substrate comprises the following steps of: providing copper powder, and a discharge plasma activated sintering device; and 2, adding the copper powder into the discharge plasma activated sintering device and sintering to prepare the target for the copper conductor of the TFT-LCD array substrate. According to the method for preparing the target for the copper conductor of the TFT-LCD array substrate, the copper powder is sintered into the target by the discharge plasma activated sintering device; the method is simple in process and high efficiency; and the crystal orientation of the target can be effectively controlled, and the performance of the target is improved, so that the copper conductor which is prepared by using the target is low in electrical resistivity, membrane stress and surface roughness.

Description

technical field [0001] The invention relates to the field of sputtering targets, in particular to a method and a target for preparing a target for copper wires of a TFT-LCD array substrate. Background technique [0002] Liquid Crystal Display (LCD, Liquid Crystal Display) has many advantages such as thin body, power saving, no radiation, etc., and has been widely used. Most of the liquid crystal display devices on the market are backlight type liquid crystal displays, which include a liquid crystal display panel and a backlight module. The working principle of the liquid crystal display panel is to place liquid crystal molecules in two parallel glass substrates, and there are many vertical and horizontal thin wires between the two glass substrates. refracted to produce a picture. [0003] Usually a liquid crystal display panel consists of a CF (Color Filter) substrate, a TFT (Thin Film Transistor) substrate, and a liquid crystal (LC, Liquid Crystal) disposed between the CF...

Claims

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Application Information

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IPC IPC(8): C23C14/34C23C14/14B22F3/105
CPCB22F2003/1051C23C14/34B22F3/105B22F2999/00C23C14/3414C23C14/14
Inventor 寇浩
Owner SHENZHEN CHINA STAR OPTOELECTRONICS TECH CO LTD
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