Al alloy film for display device

Abstract

Disclosed is an Al alloy film for use in a display device, which does not undergo the formation of hillocks even when exposed to high temperatures of about 450 to 600 DEG C, and has excellent high-temperature heat resistance, low electrical resistance (wiring resistance) and excellent corrosion resistance under alkaline environments. Specifically disclosed is an Al alloy film for use in a display device, which comprises at least one element selected from a group X consisting of Ta, Nb, Re, Zr, W, Mo, V, Hf and Ti and at least one rare earth element, and which meets the following requirement (1) when heated at 450 to 600 DEG C. (1) Precipitates each having an equivalent circle diameter of 20 nm or more are present at a density of 500,000 particles / mm2 or more in a first precipitation product containing at least one element selected from Al and the elements included in the group X and at least one rare earth element.

Description

technical field [0001] The present invention relates to an Al alloy film used in a display device such as a liquid crystal display, an Al alloy film for a display device useful as an electrode and a wiring material, a display device including the Al alloy film, and a sputtering target for forming the Al alloy film. Background technique [0002] Al alloy films for display devices are mainly used as electrodes and wiring materials. As electrodes and wiring materials, the following can be listed: gate, source and drain electrodes and wiring materials for thin film transistors of liquid crystal displays (LDC); Gate, source and drain electrodes and wiring materials for organic EL (OELD) thin film transistors; cathode and gate electrodes and wiring materials for field emission displays (FED); anodes and wiring materials for fluorescent vacuum tubes (VFD) Wire material; addressing electrode and wiring material of plasma display (PDP); back electrode of inorganic EL, etc. [0003] ...

AI Technical Summary

Problems solved by technology

However, there is a problem that there is a large potential difference between the precipitate and Al. Therefore, at the moment when the amine as the stripping solution contacts water, alkaline corrosion proceeds due to the galvanic corrosion, and the electrochemical potential Low Al ionization and elution, thus forming pit-like pitting corrosion (black spots)

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