Micro-electro-mechanical system (MEMS) strain type icing sensor and detection method

A technology of icing sensor and detection method, which is applied in the direction of microstructure technology, microstructure device, electromagnetic measurement device, etc., can solve the problems of complex manufacturing process, failure of imaging method, and reduction of measurement accuracy, and achieve high resolution and sensitivity, Reduce the effect of batch production and simple manufacturing process

Inactive Publication Date: 2012-10-31
INST OF ELECTRONICS CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] Among the several typical ice thickness measurement methods mentioned above, manual measurement and visual inspection cannot detect icing in real time; the infrared blocking method and camera method reduce the measurement accuracy when the surface of the measured object vibrates, and the camera lens is still frozen. It will lead to the failure of the imaging method; the optical fiber type, capacitive type and resistive type are very sensitive to the state of ice (transparent ice or frost ice) and composition (type and proportion of impurities), and the uncertainty of ice state and composition will c

Method used

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  • Micro-electro-mechanical system (MEMS) strain type icing sensor and detection method

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Example Embodiment

[0043] Example 1: Online monitoring of aircraft wing icing

[0044] When the flat membrane 2 of the MEMS strain-type icing sensor in the present invention is not affected by the uniform force, the zero point balance of the bridge is adjusted through the potentiometer RP1. When the flat membrane 2 is deformed by the uniformly distributed pressure in the downward direction, stress distribution appears on the surface of the flat membrane 2. The maximum stress SMX on the upper surface is located at the position of the detection resistors 3 and 3a, which is a tensile stress, which causes the detection resistors 3 and 3a to be stretched along the length of the foil grid and the resistance value increases. When the temperature does not change, the resistance values ​​of the reference resistors 4 and 4a do not change, so the bridge outputs a positive voltage value. When the temperature changes, the detection resistors 3 and 3a, and the reference resistors 4 and 4a have basically the sam...

Example Embodiment

[0045] Example 2: Daily icing data accumulation on transmission lines

[0046] Two types of icing sensors are required to detect the icing of transmission lines. The first type must have high resolution and sensitivity for detecting icing thickness, while the range does not need to be too large. It is used to monitor the icing thickness of the line when the icing is not serious. The long-term change of the icing thickness; the other type of detection range of ice thickness must be large enough, while the resolution and sensitivity do not need to be too high. The function is to cause severe icing disasters on transmission lines, and the icing thickness exceeds the range of the previous type of sensor It is used to judge whether a severe icing disaster occurs and its severity. The two types of icing sensors are used together to know the long-term loss of icing thickness before the occurrence of severe icing disasters. Combining the two types of icing sensors with monitoring device...

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Abstract

The invention discloses a micro-electro-mechanical system (MEMS) strain type icing sensor and a detection method, and relates to icing thickness detection technologies. The MEMS strain type icing sensor comprises a dual-rectangle-shaped frame, a peripherally clamped square flat film, detection resistors, reference resistors, an ice melting resistor and electrode leads. A detection system is formed by the MEMS strain type icing sensor and an interface circuit. When an icing phenomenon is detected, a Wheatstone bridge is formed by the detection resistors and the reference resistors, and the detection resistors are used to sense stress changes of the surface of the flat film, which are caused by the icing, thereby achieving the aim of icing detection. On the one hand, the interface circuit is used for providing constant current drive for the Wheatstone bridge; and on the other hand, the interface circuit is used for amplifying voltage signals output by the bridge and conducting temperature compensation on the voltage signals.

Description

Technical field [0001] The invention relates to the technical field of icing thickness detection, and is a MEMS strain-type icing sensor and detection method, which can perform fixed-point online continuous monitoring of the icing thickness of sub-millimeters on the surface of objects such as airplanes and transmission lines. Background technique [0002] The sensors and detection methods that have been proposed to quantitatively detect the thickness of ice on the surface of airplanes, transmission lines, towers, insulators and other relatively stationary objects can be divided into the following two categories. [0003] The first category is the direct measurement method, which directly measures the icing thickness on the surface of an object by manual or other equipment. Several typical direct measurement methods are: (1) manual measurement, relying on manual rulers to directly measure the ice thickness on site; (2) visual measurement method, relying on human eyes to observe the ...

Claims

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Application Information

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IPC IPC(8): G01B7/06G01L1/18B81C1/00
Inventor 陈德勇李宗兴王军波
Owner INST OF ELECTRONICS CHINESE ACAD OF SCI
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