Micro-electro-mechanical system (MEMS) strain type icing sensor and detection method

Abstract

The invention discloses a micro-electro-mechanical system (MEMS) strain type icing sensor and a detection method, and relates to icing thickness detection technologies. The MEMS strain type icing sensor comprises a dual-rectangle-shaped frame, a peripherally clamped square flat film, detection resistors, reference resistors, an ice melting resistor and electrode leads. A detection system is formed by the MEMS strain type icing sensor and an interface circuit. When an icing phenomenon is detected, a Wheatstone bridge is formed by the detection resistors and the reference resistors, and the detection resistors are used to sense stress changes of the surface of the flat film, which are caused by the icing, thereby achieving the aim of icing detection. On the one hand, the interface circuit is used for providing constant current drive for the Wheatstone bridge; and on the other hand, the interface circuit is used for amplifying voltage signals output by the bridge and conducting temperature compensation on the voltage signals.

Description

Technical field [0001] The invention relates to the technical field of icing thickness detection, and is a MEMS strain-type icing sensor and detection method, which can perform fixed-point online continuous monitoring of the icing thickness of sub-millimeters on the surface of objects such as airplanes and transmission lines. Background technique [0002] The sensors and detection methods that have been proposed to quantitatively detect the thickness of ice on the surface of airplanes, transmission lines, towers, insulators and other relatively stationary objects can be divided into the following two categories. [0003] The first category is the direct measurement method, which directly measures the icing thickness on the surface of an object by manual or other equipment. Several typical direct measurement methods are: (1) manual measurement, relying on manual rulers to directly measure the ice thickness on site; (2) visual measurement method, relying on human eyes to observe the ...

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Problems solved by technology

[0005] Among the several typical ice thickness measurement methods mentioned above, manual measurement and visual inspection cannot detect icing in real time; the infrared blocking method and camera method reduce the measurement accuracy when the surface of the measured object vibrates, and the camera lens is still frozen. It will lead to the failure of the imaging method; the optical fiber type, capacitive type and resistive type are very sensitive to the state of ice (transparent ice or frost ice) and composition (type and proportion of impurities), and the uncertainty of ice state and composition will cause detection Uncertainty of the results; the magnetostrictive vibrating cylinder type and the piezoelectric flat film type respectively require electromagnetic coils and piezoelectric ceramic excitation sources, which are difficult to achieve miniaturization; the capacitive icing sensor proposed by NASA in the United States has achieved miniaturization, but Its production process is relatively complicated, and the electrostatic bonding process in the production process is easy to introduce stress. The icing signal output by the sensor is a very small capacitance change, which is very difficult to detect.

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