Cover plate-free carbon nanotube device structure and manufacturing method thereof

Abstract

The invention discloses a cover plate-free carbon nanotube device structure and a manufacturing method thereof. The structure includes a (100) monocrystalline silicon substrate, carbon nanotubes and a metal electrode. On the (100) monocrystalline silicon substrate is arranged a groove with a substantially rhombic section and running over the whole (100) monocrystalline silicon substrate width. The carbon nanotubes cross over the groove and keep suspended over the groove. The metal electrode is located on two sides of the groove and separately covers the parts of the carbon nanotubes crossing on the two sides of the groove, so that the carbon nanotubes and the metal electrode on the two sides of the groove form electrical connection. The inventive device structure is used for carbon nanotube electronic devices and sensors. As a cover plate is obviated, the device structure manufacturing process is simple and the yield is high so that the device structure is suitable for array production.

Description

technical field [0001] The invention relates to a carbon nanotube device structure and a manufacturing method thereof, in particular to a carbon nanotube device structure without a cover plate and a manufacturing method thereof, and is especially suitable for manufacturing large-scale carbon nanotube electronic devices and sensors. The invention belongs to the field of nanometer electronic devices and sensors. Background technique [0002] Carbon nanotubes are emerging functional nanomaterials. The detector made by it has the advantages of small size, low power consumption and high sensitivity. In terms of infrared detection, in 2001, Xu Jianmin and others grew multi-walled carbon nanotube arrays perpendicular to the substrate on a porous alumina template, realizing the detection of infrared light, but the device manufacturing process is complicated and the controllability is poor. In 2006, MikhailE.Itkis and others used single-walled carbon nanotube film as a sensitive el...

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Problems solved by technology

In terms of infrared detection, in 2001, Xu Jianmin and others grew a multi-walled carbon nanotube array perpendicular to the substrate on a porous alumina template, and realized the detection of infrared light, but the device manufacturing process is complicated and the controllability is poor.

In 2006, MikhailE.Itkis and others used single-walled carbon nanotube films as sensitive elements to realize infrared detection, but the device is large in size and difficult to mass-produce, which limits the scope of application

In 2007, Jiangbo Zhang et al placed a single multi-walled carbon tube between the gold electrodes by means of AFM control, and made a single multi-walled carbon tube infrared sensitive device, but the device is difficult to manufacture and it is difficult to mass-produce

In terms of THz detection, in 2008, K.Fu et al. deposited single-walled carbon tubes on gold electrodes by electrophoresis, but this structure is difficult to achieve ohmic contact between electrodes and carbon tubes, and the signal-to-noise ratio of device detection is not high.

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