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System and method for simultaneously removing carbon tetrafluoride (CF4) and concomitant nitrogen oxide (NOx) gases

A gas removal technology, applied in chemical instruments and methods, separation methods, dispersed particle separation, etc., can solve the problems of unstable treatment effect, inability to remove, catalyst capacity limitation, etc. of the gas to be treated, so as to improve the utilization efficiency and avoid Active effect, guaranteed active effect

Inactive Publication Date: 2012-12-19
DALIAN MARITIME UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] The utility model patent with the notification number CN201454385U discloses a system for removing perfluorocarbon gases. The plasma reaction device and the catalytic reaction device of the system are integrally structured, that is, the height and diameter of the reaction tube equipped with a catalyst bed are Fixed, resulting in a limited capacity for loading catalysts, the treatment effect on the gas to be treated containing different concentrations of PFCs is very unstable, and cannot remove the NO produced during the treatment of PFCs x gas

Method used

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  • System and method for simultaneously removing carbon tetrafluoride (CF4) and concomitant nitrogen oxide (NOx) gases
  • System and method for simultaneously removing carbon tetrafluoride (CF4) and concomitant nitrogen oxide (NOx) gases
  • System and method for simultaneously removing carbon tetrafluoride (CF4) and concomitant nitrogen oxide (NOx) gases

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Embodiment 1

[0032] A flow controller 2 is arranged at the input port 1 of the gas to be treated, and the flow controller is connected to the quartz tube reactor 3 through a pipeline, and the plasma 4 is generated by microwaves inside the quartz tube reactor, and the plasma is generated by microwaves The device 6 provides energy through the waveguide 5, and the waveguide and the quartz tube reactor are connected by a central point direct coupling mode; the quartz tube reactor and the quartz tube 15 of the catalytic reaction device are connected by a flange or a screw 7, so that the filled catalyst The inner diameter and length of the quartz tube are adjustable. After being treated by plasma, the gas to be treated passes through the catalyst bed for reaction, and the outside of the quartz tube reactor wall filled with the catalyst is covered with an insulating layer 9 . The treated gas enters the tail gas treatment device through the flange or screw, and the exhaust gas inlet 11 is provided...

Embodiment 2

[0034] Adopt the device described in embodiment 1 to process containing CF 4 and NO x Gas waste gas method that will be treated containing CF 4 The gas 1 passes through the flow controller 2 into the reaction tube 3, the inner diameter of the reaction tube 3 is about 15mm, and the length is about 500mm; the microwave power is 200W-2000W, the gas flow rate is 2L / min, CF 4 The concentration is 2000mL / m 3 , using microwave ignition in the reaction tube to generate microwave plasma to continuously process the mixed gas; the treated gas is further processed through the catalyst bed 8 . The volume of the catalyst bed is about 30mL, and the temperature of the bed is 600-900K. The treated gas adopts wet method (wet absorption method uses saturated Ca(OH) 2 solution as absorbent) or dry absorption method (dry absorption method uses aluminum oxide powder as absorbent) and discharge after absorption treatment. Total CF 4 The removal efficiency is shown in Table 1.

[0035] Table I...

Embodiment 3

[0040] CF 4 The gas 1 is passed into the reaction tube 3 through the flow controller (or valve) 2, the inner diameter of the reaction tube 3 is about 15mm, and the length is about 500mm; the microwave power is 200W-2000W, the gas flow rate is 2L / min, CF 4 The concentration is 2000mL / m 3 , using microwave ignition in the reaction tube to generate microwave plasma to continuously process the mixed gas; the treated gas is further processed through the catalyst bed 8 . The volume of the catalyst bed is about 100mL, and the temperature of the bed is 600-900K. The treated gas is absorbed and treated by wet or dry absorption method and discharged, and the wet absorption liquid adopts saturated Ca(OH) 2 The solution and the dry absorbent use aluminum oxide powder, and the temperature is below 40 degrees at room temperature. When the catalyst is Ag / γ-Al 2 O3, the by-product NO x After the system runs for 40 minutes, the concentration does not change significantly, and the concentr...

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Abstract

The invention provides a system and a method for simultaneously removing carbon tetrafluoride (CF4) and concomitant nitrogen oxide (NOx) gas. The system comprises a flow controller, a plasma reaction device, a catalytic reaction device and a tail gas processing device, wherein the catalytic reaction device is connected between the plasma reaction device and the tail gas processing device through a flange or a screw, so that the catalytic reaction device can be replaced; the catalytic reaction device comprises a silica tube; the silica tube is internally filled with a catalyst bed layer; the outer wall of the silica tube is coated with an insulating layer; the tail gas inlet of the tail gas processing device is connected with an absorption chamber through an inclined pipeline; and the top of the absorption chamber is provided with a tail gas outlet. The method for simultaneously removing CF4 and concomitant NOx gases by virtue of the system is as follows: performing microwave ignition in a quartz tube reactor and carrying out continuous processing on to-be-processed gases; reprocessing the processed mixed gas by virtue of a catalyst; and performing heat preservation on the catalyst by virtue of the insulating layer, thereby simultaneously removing the CF4 and concomitant NOx gases. The system and the method have the characteristics of high CF4 removal efficiency, low energy consumption and no secondary pollution.

Description

technical field [0001] The invention relates to a waste gas treatment system and treatment method, in particular to a system and method for simultaneously removing carbon tetrafluoride and nitrogen oxides. Background technique [0002] Carbon tetrafluoride (CF 4 ) is the most stable gas among perfluorocarbons (referred to as PFCs). Due to its long existence in the atmosphere and strong infrared absorption capacity, it can cause a strong greenhouse effect. CF 4 Exhaust gases are mainly generated by the semiconductor industry, and the control of their emissions has attracted intense attention worldwide over the past three decades. In recent years, with the rapid development of my country's semiconductor industry, CF 4 Emissions are increasing year by year. Relevant domestic data show that my country's CF 4 Research on reduction technology has not yet started, which will restrict my country's semiconductor industry and its cooperation with CF 4 Sustainable development of ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01D53/76B01D53/86B01D53/56B01D53/70
Inventor 朱小梅孙冰解宏端张连政
Owner DALIAN MARITIME UNIVERSITY
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