Guide cylinder and preparation method thereof

A guide tube and production method technology, applied in chemical instruments and methods, self-melting liquid pulling method, crystal growth, etc., can solve the problems of poor heat preservation effect, short service life, and many consumables

Active Publication Date: 2015-06-17
HUNAN KINGBO CARBON CARBON COMPOSITES CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Judging from the effect of use, this guide tube has the following disadvantages: first, graphite is a good conductor of heat, and the heat preservation effect is poor; second, graphite has low strength, is easily damaged during use, and has a short service life; third, it is large in size It is difficult to form the inner and outer graphite screens, and there are many consumables
The above-mentioned guide tube can no longer meet the current production requirements

Method used

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  • Guide cylinder and preparation method thereof
  • Guide cylinder and preparation method thereof
  • Guide cylinder and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0034] Depend on figure 1 , figure 2 It can be seen that a guide tube includes an inverted cone cylinder, and the cylinder includes an outer screen 3 and an inner screen 5, and an insulating layer 4 is provided between the outer screen 3 and the inner screen 5. The outer screen 3 is made of carbon / carbon composite material, and the inner screen 5 is made of metal molybdenum or metal tungsten (molybdenum metal is used in this embodiment); the outer screen 3 is connected with the outer screen 3 , the positioning disc 1 covered by the inner screen 5 and the insulation layer 4, so that the outer screen 3, the inner screen 5, the insulation layer 4 and the positioning disc 1 form an integral structure.

[0035] The thickness of the inner screen 5 according to the present invention is 0.5㎜~1.5㎜ (0.8㎜ in this embodiment); the positioning plate 1 is a multi-lobe structure (a two-lobe structure evenly divided in this embodiment), and graphite or Made of carbon / carbon composite mater...

Embodiment 2

[0042] The positioning plate 1 of the present invention has a multi-lobed structure (this embodiment is a two-lobed structure), made of graphite, with a thickness of 5 mm to 15 mm (10 mm in this embodiment), and a density of 1.7 g / ㎝ 3 ~2.0g / ㎝ 3 (This embodiment is 1.8g / ㎝ 3 ).

[0043] A kind of preparation method of above-mentioned guide cylinder, it adopts density as 1.7g / ㎝ in step (1) in positioning disc 1 3 ~2.0g / ㎝ 3 (This embodiment is 1.8g / ㎝ 3 ) graphite material is machined according to the required size, and the thickness is 5 mm to 15 mm (10 mm in this embodiment); The positioning plate 1 is prepared by step (1) and connected with the outer screen 3 through fasteners, so that the positioning plate 1 covers the outer screen 3, the insulation layer 4, and the inner screen 5 to form a tight whole.

[0044] The rest are the same as embodiment 1.

Embodiment 3

[0046] The inner screen 5 of the present invention is made of metal molybdenum or metal tungsten (the metal tungsten used in this embodiment); the positioning plate 1 is made of graphite, with a thickness of 5mm-15mm (this embodiment 10㎜), the density is 1.7g / ㎝ 3 ~2.0g / ㎝ 3 (This embodiment is 1.8g / ㎝ 3 ); said insulation layer 4 has a density of 0.1g / ㎝ 3 ~0.5g / ㎝ 3 (0.25 g / ㎝ in this example 3 ) of cured felt or polyacrylonitrile-based carbon felt (this embodiment is cured felt).

[0047] The rest are the same as in embodiment 2.

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Abstract

The invention discloses a guide cylinder capable of shortening the crystal pulling time and improving the crystal pulling speed and a preparation method. The guide cylinder comprises an inverted conical cylinder; the cylinder comprises an outer screen (3) and an inner screen (5); a thermal insulation layer (4) is arranged between the outer screen (3) and the inner screen (5); the guide cylinder is characterized in that the outer screen (3) is prepared from carbon / carbon composite material; the inner screen (5) is prepared from metal molybdenum or metal tungsten; the outer screen (3) is connected with a positioning disc (1) so that the outer screen (3), the inner screen (5), the thermal insulation layer (4) and the positioning disc (1) form an integral structure; and the guide cylinder is produced by the steps of blank production, purification, surface coating and cylinder assembly. The guide cylinder disclosed by the invention has good thermal insulation effect, high strength, long service life and good reflection effect, effectively increases the axial temperature gradient, accelerates the crystal pulling, shortens the crystal pulling time and effectively improves the production efficiency.

Description

technical field [0001] The invention relates to a thermal field part of a single crystal furnace, in particular to a guide tube and a preparation method thereof, in particular to a guide tube combined with a carbon / carbon composite material and a metal material and a preparation method thereof. Background technique [0002] The thermal field system of the monocrystalline silicon drawing furnace has a great influence on the whole bar rate and yield of monocrystalline silicon, the pulling speed, and the quality of the monocrystalline silicon rod. Therefore, the thermal field system design and the key components in the thermal field The selection and use of materials have attracted much attention. The guide tube is one of the key elements of the thermal field system of the single crystal silicon drawing furnace, and it is mainly used to control the axial temperature gradient of the thermal field and guide the argon flow. The guide tube blocks the thermal radiation of the singl...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C30B15/00C30B29/06C04B35/83C04B35/52
Inventor 廖寄乔邰卫平谭周建李军王跃军龚玉良
Owner HUNAN KINGBO CARBON CARBON COMPOSITES CO LTD
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