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Preparation method of Ti-doped diamond-like carbon (DLC) coating

A coating and bottom layer technology, which is applied in the field of preparation of diamond-like coatings (hereinafter referred to as DLC coatings), can solve the problems that cannot be completely eliminated, poor surface roughness, etc.

Inactive Publication Date: 2013-02-13
XIAN HAOYUAN COATING TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, due to the limitations of the preparation principle itself, the droplets in the arc ion plating coating cannot be completely eliminated, resulting in a loose coating structure and poor surface roughness.

Method used

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  • Preparation method of Ti-doped diamond-like carbon (DLC) coating

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Embodiment Construction

[0021] The present embodiment provides a method for preparing a Ti-doped DLC coating. It should be noted that the method for preparing a Ti-doped DLC coating of the present invention can be carried out on any material selected for cutting tools, molds and mechanical wear-resistant parts. , not limited to this example.

[0022] The concrete preparation process of this embodiment is:

[0023] (1) A high-speed steel (W18Cr4V) substrate with a hardness of HRC=60 after quenching at 1170°C and tempering at 550°C was used as the sample. After surface degreasing and polishing, it was immersed in acetone for ultrasonic cleaning and alcohol dehydration.

[0024] (2) Put the pretreated sample into the arc and magnetron sputtering composite coating equipment. like figure 1 As shown, the arc and magnetron sputtering composite coating equipment at least includes a vacuum chamber 1, a turret 2, a bias voltage 3, a turret rod 4, a plane C target 5, a permanent magnet 6, a column arc Ti targ...

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Abstract

The invention discloses a method for preparing a Ti-doped diamond-like carbon (DLC) coating, which comprises steps as follows: a pretreated matrix is put on a turner post of electric arc-magnetron sputtering composite coating equipment; by using a column arc Ti target as a Ti source and three pairs of planar C targets as C sources, the column arc Ti target and planar C targets are uniformly distributed on the inner wall of the furnace body, and high-purity Ar is used as a main ionization gas to ensure the effective glow discharge process; and high-purity N2 used as a reactant gas is ionized and combined with elements Ti and C so as to deposit and form the Ti-doped DLC coating on the matrix surface. The prepared Ti-doped DLC coating appears black, and has a smooth and compact surface; the coating hardness is 28GPa, the film-base binding force is up to 60N, and the coating thickness is 2.5 mu m; and when the friction pair is Al2O3 balls, the dry friction coefficient of the coating is 0.2. Thus, the Ti-doped DLC coating has favorable wear resistance and anti-friction property.

Description

technical field [0001] The invention belongs to the field of coating material preparation, and in particular relates to a preparation method of a Ti-doped diamond-like coating (hereinafter referred to as DLC coating). The DLC coating prepared by the method of the present invention has wear resistance and anti-friction properties, black appearance, smooth and compact surface, coating hardness of 28GPa, film base bonding force of 60N, coating thickness of 2.5 μm, and friction coefficient of 0.2. It is expected to further meet the higher requirements of coatings in the application of cutting tools, molds and mechanical wear-resistant parts. Background technique [0002] With the rapid development of advanced manufacturing technology, higher requirements are placed on the precision, service life and function of cutting tools, molds and mechanical parts, especially their surface quality determines the pass rate and production efficiency of processed products. And the performance...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/22C23C14/06C23C14/54
Inventor 马胜利
Owner XIAN HAOYUAN COATING TECH
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