Production method for high-compactness chromium alloy target
A production method, chromium alloy technology, applied in metal material coating technology, ion implantation plating, coating, etc., can solve the problems of lack of preparation technology, etc., and achieve simple and easy control of the process, low production cost, and uniform density Effect
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Embodiment 1
[0038] This example provides a method for producing a chromium-nickel alloy target, which includes the following steps in sequence:
[0039] (I), vacuum degassing
[0040] Use -200 mesh, purity of 99.95wt%, oxygen content (718ppm) chromium powder and nickel powder (requires -200 mesh, purity greater than 99.9%, oxygen content of 690ppm) as raw materials, the weight ratio of chromium powder and nickel powder 4:1, mix evenly, first pressurize 5MPa to ensure that the powder will not overflow a lot during the vacuuming process, and keep the vacuum at 10 -3 Under the environment of Pa, raise the temperature to 700°C at a rate of 200°C / h, keep it warm for 1 hour, and fill it with argon;
[0041] (Ⅱ), step-by-step temperature increase and pressure increase
[0042]In order to ensure that the flow and bonding of chromium materials are carried out in an orderly manner during the high-temperature sintering process, the hot-pressing process adopts a multi-stage temperature increase and...
Embodiment 2
[0057] This example provides a method for producing a nickel-chromium-silicon alloy target, which includes the following steps in sequence:
[0058] (I), vacuum degassing
[0059] Use -200 mesh, 99.95wt% purity, 718ppm oxygen content chromium powder, nickel powder (require -200 mesh, purity greater than 99.9%, oxygen content 690ppm) and silicon powder (require -200 mesh, purity greater than 99.99%, Oxygen content is 800ppm) as the raw material, the weight ratio of chromium powder, nickel powder and silicon powder is 45:30:25. keep it at 10 -3 Under the environment of 300°C / h, the temperature was raised to 700°C, kept for 1 hour, and filled with argon.
[0060] (Ⅱ), step-by-step temperature increase and pressure increase
[0061] Pressurize to 10MPa, then heat to 1100°C at a heating rate of 200°C / h, and keep warm for 1 hour to ensure uniform temperature distribution in the mold cavity. Finally, heat up to 1400°C at a heating rate of 100°C / h, hold for 1 hour, start from 1100...
Embodiment 3
[0076] This example provides a method for producing a chromium-titanium alloy target, which includes the following steps in sequence:
[0077] (I), vacuum degassing
[0078] Use -200 mesh, purity of 99.95wt%, chromium powder and titanium powder with oxygen content of 718ppm (requires -200 mesh, purity greater than 99.9%, oxygen content of 990ppm) as raw materials, and the weight ratio of chromium powder and titanium powder is 9:1, mix evenly, pressurize 5MPa first to ensure that the powder will not overflow a lot during the vacuuming process, and keep the vacuum at 10 -3 Under the environment of 300°C / h, the temperature was raised to 650°C, kept for 1 hour, and filled with argon.
[0079] (Ⅱ), step-by-step temperature increase and pressure increase
[0080] In order to ensure that the flow and bonding of chromium materials are carried out in an orderly manner during the high-temperature sintering process, the hot-pressing process adopts a multi-stage temperature increase and...
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