Preparation method of nano metal oxide functionalized carbon nanotubes and gas sensor

Abstract

The invention discloses a preparation method of nano metal oxide functionalized carbon nanotubes and a gas sensor. The method comprises the following steps of: dropping carbon nanotubes which are dispersed in a dispersant to the surface of a substrate, and drying the substrate; placing the obtained substrate into a mixing solution of ammonium salt, alkali and metal salt; preserving the heat of the mixing solution containing the substrate for a certain duration, and taking out the substrate; and annealing the substrate which is taken out, to obtain nano metal oxide functionalized carbon nanotubes formed on the substrate. The method is comparatively simple in preparation process, free from strict reaction condition, favorable for industrial mass production and comparatively low in cost; and the nano metal oxide functionalized carbon nanotubes prepared by the method disclosed by the invention, in preparing the gas sensor, can detect some special gases, in particular formaldehyde, and precision is comparatively high.

Description

technical field

[0001] The invention belongs to the technical field of electronic device manufacturing, and in particular relates to a preparation method of nanometer metal oxide functionalized carbon nanotubes and a gas sensor of nanometer metal oxide functionalized carbon nanotubes prepared by the method. Background technique

[0002] Carbon nanotubes have unique properties, such as electrical properties, chemical properties, physical properties and mechanical properties. Since they were discovered in 1991, they have attracted widespread attention. Studies have found that due to the large specific surface area of ​​carbon nanotubes, the surface With many active groups, the preparation of nanosensors has become one of the research hotspots in the field of micro-nano devices.

[0003] The use of carbon nanotubes for gas detection has a good response to certain gases. However, the gas sensor made of simple carbon nanotubes has slow response speed, low sensitivity and high de...

Examples

preparation example Construction

[0037] ginseng figure 1 , to introduce a specific embodiment of the preparation method of the nanometer metal oxide functionalized carbon nanotubes of the present invention. In this embodiment, the method includes the following steps:

[0038] S1. Adding carbon nanotubes dispersed in a dispersant onto the surface of the substrate dropwise, and drying the substrate.

[0039]The dispersant is used to disperse the carbon nanotubes, so that the carbon nanotubes are evenly distributed in the dispersant, and ensure the uniformity of the distribution of the carbon nanotubes on the substrate after the substrate is dried in subsequent operations. The dispersant can be, for example, water, or dimethylformamide (DMF), or sodium dodecyl sulfate (SDS) aqueous solution, or ethanol, or ethylene glycol, or triton aqueous solution. When drying the substrate, the temperature range is controlled at 1~600°C, and the time range is 1s~15h. The temperature when drying the substrate corresponds to...

Embodiment 1

[0054] Weigh 0.6875g of sodium hydroxide, and dissolve 2.675g of ammonium chloride in 250ml of deionized water. Take 20ml of the prepared solution and pour it into the sample bottle, then take 0.09g of nickel chloride and put it into the sample bottle, and fully dissolve it. Here, the molar ratio range of ammonium chloride, nickel chloride and sodium hydroxide is controlled between 100:10:1~1:10:100. Dry the substrate with carbon nanotubes added dropwise and put it into a sample bottle, put the sample bottle into a water bath at 55°C, keep it warm for 5min, then take out the substrate, dry it and anneal it at 400°C After 2 hours of heat preservation, the nano-nickel oxide functionalized carbon nanotube (NiO / CNT) material was finally obtained. The structural photos of the prepared nano-nickel oxide functionalized carbon nanotube material under the scanning electron microscope are as follows: Figure 4 (500nm class accuracy) and Figure 5 (250nm-level precision), the obtained...

Embodiment 2

[0057] Put 4mg of sodium hydroxide, 0.21g of ammonium chloride, 0.26g of zinc chloride and 20ml of deionized water into the sample bottle to dissolve, then dry the substrate with carbon nanotubes dropped into the sample bottle and put the sample bottle in a water bath at 55°C for 1h, then take out the substrate, dry it and anneal at 400°C for 2h, and finally get nano-zinc oxide functionalized carbon nanotubes (ZnO / CNT) Material. The structural photo of the prepared nano-zinc oxide functionalized carbon nanotube material under the scanning electron microscope is as follows: Figure 6 (500nm class accuracy) and Figure 7 (250nm-level precision), the obtained homogeneous nano-zinc oxide functionalized carbon nanotubes.

technical field

[0001] The invention belongs to the technical field of electronic device manufacturing, and in particular relates to a preparation method of nanometer metal oxide functionalized carbon nanotubes and a gas sensor of nanometer metal oxide functionalized carbon nanotubes prepared by the method. Background technique

[0002] Carbon nanotubes have unique properties, such as electrical properties, chemical properties, physical properties and mechanical properties. Since they were discovered in 1991, they have attracted widespread attention. Studies have found that due to the large specific surface area of ​​carbon nanotubes, the surface With many active groups, the preparation of nanosensors has become one of the research hotspots in the field of micro-nano devices.

[0003] The use of carbon nanotubes for gas detection has a good response to certain gases. However, the gas sensor made of simple carbon nanotubes has slow response speed, low sensitivity and high de...

Examples

preparation example Construction

[0037] ginseng figure 1 , to introduce a specific embodiment of the preparation method of the nanometer metal oxide functionalized carbon nanotubes of the present invention. In this embodiment, the method includes the following steps:

[0038] S1. Adding carbon nanotubes dispersed in a dispersant onto the surface of the substrate dropwise, and drying the substrate.

[0039]The dispersant is used to disperse the carbon nanotubes, so that the carbon nanotubes are evenly distributed in the dispersant, and ensure the uniformity of the distribution of the carbon nanotubes on the substrate after the substrate is dried in subsequent operations. The dispersant can be, for example, water, or dimethylformamide (DMF), or sodium dodecyl sulfate (SDS) aqueous solution, or ethanol, or ethylene glycol, or triton aqueous solution. When drying the substrate, the temperature range is controlled at 1~600°C, and the time range is 1s~15h. The temperature when drying the substrate corresponds to...

Embodiment 1

[0054] Weigh 0.6875g of sodium hydroxide, and dissolve 2.675g of ammonium chloride in 250ml of deionized water. Take 20ml of the prepared solution and pour it into the sample bottle, then take 0.09g of nickel chloride and put it into the sample bottle, and fully dissolve it. Here, the molar ratio range of ammonium chloride, nickel chloride and sodium hydroxide is controlled between 100:10:1~1:10:100. Dry the substrate with carbon nanotubes added dropwise and put it into a sample bottle, put the sample bottle into a water bath at 55°C, keep it warm for 5min, then take out the substrate, dry it and anneal it at 400°C After 2 hours of heat preservation, the nano-nickel oxide functionalized carbon nanotube (NiO / CNT) material was finally obtained. The structural photos of the prepared nano-nickel oxide functionalized carbon nanotube material under the scanning electron microscope are as follows: Figure 4 (500nm class accuracy) and Figure 5 (250nm-level precision), the obtained...

Embodiment 2

[0057] Put 4mg of sodium hydroxide, 0.21g of ammonium chloride, 0.26g of zinc chloride and 20ml of deionized water into the sample bottle to dissolve, then dry the substrate with carbon nanotubes dropped into the sample bottle and put the sample bottle in a water bath at 55°C for 1h, then take out the substrate, dry it and anneal at 400°C for 2h, and finally get nano-zinc oxide functionalized carbon nanotubes (ZnO / CNT) Material. The structural photo of the prepared nano-zinc oxide functionalized carbon nanotube material under the scanning electron microscope is as follows: Figure 6 (500nm class accuracy) and Figure 7 (250nm-level precision), the obtained homogeneous nano-zinc oxide functionalized carbon nanotubes.

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