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Function coating imaging-self method of polydimethylsiloxane three-dimensional structure

A technology of polydimethylsiloxane and dimethylsiloxane, which is applied in the field of self-patterning of functional coatings of polydimethylsiloxane three-dimensional structure, achieves high coverage, easy observation and control, and good effect. excellent effect

Inactive Publication Date: 2015-07-08
SUN YAT SEN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The purpose of the present invention is to provide a self-patterning method for functional coatings with polydimethylsiloxane three-dimensional structure in view of the technical deficiencies of existing surface modification

Method used

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  • Function coating imaging-self method of polydimethylsiloxane three-dimensional structure
  • Function coating imaging-self method of polydimethylsiloxane three-dimensional structure
  • Function coating imaging-self method of polydimethylsiloxane three-dimensional structure

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Embodiment 1

[0034] Such as Figure 1-7 Shown in, (a) roughening of SU-8 pattern; b) Deposition C x f y polymer; (c) polydimethylsiloxane casting and release; (d) covering polydimethylsiloxane with a volatile solution; (e) evaporating until the solution only remains on the rough surface; (f ) coating curing; (g) polydimethylsiloxane-glass bonding. The process flow is as follows:

[0035] 1) Fabrication of three-dimensional microstructure: uniformly coat the SU-8 negative resist layer on the silicon wafer; after alignment and photolithography, perform photolithography treatment on the SU-8 negative resist layer to form a number of penetrating second photoresist layers through holes, and three-dimensional microstructures are arranged between adjacent through holes;

[0036] 2) Wetting property modification: use oxygen plasma etching surface treatment technology to make the surface of the three-dimensional microstructure rough, while the substrate remains smooth;

[0037] 3) Deposition: ...

Embodiment 2

[0055] This embodiment is the same as Embodiment 1 except for the following features: the functional coating material is glass resin, the commercial model is GR650 F; the solvent is toluene, and the concentration of toluene is 1-35 wt%. Among them, GR650F with a concentration of 3.5 wt%, was uniformly covered by the toluene solution in the polydimethylsiloxane (PDMS) microwell after curing.

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Abstract

The invention discloses a function coating imaging-self method of a polydimethylsiloxane (PDMS) three-dimensional microstructure, and the function coating imaging-self method of the PDMS three-dimensional microstructure includes the following steps of manufacturing and roughing the three-dimensional microstructure for the PDMS, depositing a fluorocarbon CxFy polymer, casting and demoulding, covering the volatile function coating solution, evaporating the solution until the solution is only remained on the rough surface, curing the coating, and binding the polydimethylsiloxane-glass, so that the imaging of the polydimethylsiloxane is characterized by being high in coverage and high in uniformity, and unaffecting on the binding features between the PDMS and a substrate; an effective surface modification is carried out on the PDMS.

Description

technical field [0001] The invention relates to the technical field of surface modification of semiconductor technology, in particular to a self-patterning method of a polydimethylsiloxane three-dimensional functional coating. Background technique [0002] Polydimethylsiloxane (PDMS), which is transparent, cheap and easy to synthesize, is a functional material widely used in micro total analysis system (MicroTAS). However, polydimethylsiloxane is hydrophobic, will swell in organic solvents, and will non-selectively absorb hydrophobic substances. The above shortcomings greatly limit its application in the fields of biology and chemistry. [0003] In order to solve the above problems, the existing method is to modify the surface of the polydimethylsiloxane or to cover the surface of the polydimethylsiloxane with a functional coating. Due to the relatively stable chemical properties of polydimethylsiloxane, it is difficult to carry out chemical treatment, so the existing poly...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/312
Inventor 吴天准苏宇泉项荣桂许春祝渊汤子康铃木宏明四方哲也
Owner SUN YAT SEN UNIV
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