Plant water conservation and usage system in semiconductor industry

Abstract

The invention discloses a plant water conservation and usage system in a semiconductor industry. The water conservation and usage system is characterized in that the system firstly implements softening treatment to original water (municipal running water) through an ion-exchange material, the softened water enters an ultra-pure water UPW system, and most water is made into ultra-pure water which is supplied as semiconductor production water of enterprise; water discharged from the ultra-pure water UPW system is delivered into a first collection groove and is used in three paths, wherein one path is supplied as water supplementation for a cooling tower system of the enterprise, another path is used for flushing toilet in enterprise living quarter and the other path is used for back-flushing of a pretreatment filter; used and discharged water of the semiconductor production water is treated by a membrane filtration through a second collection groove so as to realize a solid-liquid separation; and the water obtained from the membrane filtration is recovered for the second stage reverse osmosis water supplementation in the ultra-pure water UPW system. The water conservation and usage system disclosed by the invention adopts operational research where mathematics and social science intersect as a subject theory, and establishes a water resource management model from aspects of water balance and suitable water quality, so as to achieve recycle of the water resource.

Description

technical field [0001] The invention relates to a water-saving water project, in particular discloses a water-saving water system for factories in the semiconductor industry, which changes the traditional terminal purification treatment recycling water-saving technology, and is a water-saving system beneficial to the environment. The invention relates to the fields of pure water treatment, grinding wastewater treatment, water-saving management mathematical model, etc., and is a key technology in the high-tech field supported by the state and the high-tech industrialization key field that is currently prioritized for development. Background technique [0002] The level of today's microelectronics information technology has been regarded as an important symbol of a country's modernization level. Monocrystalline silicon (Si) material is the foundation of the semiconductor industry. In the rapidly developing microelectronic information (IC) industry and solar photovoltaic (PV) i...

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Problems solved by technology

[0006] After the ultrapure water in the semi-solid electronics industry is used in the production line, it will produce wastewater containing silicon powder, but except for solid impurities, there is no ion intake, and the resistivity is not greatly affected. Simply put, it is pure water with some solid impurities. , and the current wastewater generally adopts the chemical flocculation sedimentation method, which not only involves chemicals to affect the purity of the water quality, resulting in limited water quality utilization, but also increases the amount of sludge due to the input of chemical flocculants

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