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Sticky product with silicon erosion resistance of carbon/carbon composite material and preparation method thereof

A carbon composite material and product technology, applied in the field of composite materials, can solve the problems of non-resistance to silicon vapor corrosion, low protection efficiency, high manufacturing cost, and achieve the effects of reducing pollution loss, reducing labor for reclaiming, and long service life

Active Publication Date: 2013-07-10
山东道普安制动材料有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] Although the world and my country have made considerable progress in carbon-carbon composite materials substitution in graphite products for semiconductor and photovoltaic industries, there are still the following problems: (1) The manufacturing cost is still very high (generally graphite products double, or even higher)
This technical solution has the following disadvantages: 1. The density is not uniform, the surface layer density is high, and the core density is low; 2. There is no protective layer, and it is not resistant to silicon vapor erosion
This technical solution has the following disadvantages: 1. The density is uneven, the surface density is high, and the core density is low; 2. Silicon carbide does not directly protect the carbon fiber on the fiber surface or the crucible surface, but is scattered in the matrix, and the protection efficiency is not good. High; 3 high preparation cost

Method used

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  • Sticky product with silicon erosion resistance of carbon/carbon composite material and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0043] Prepare a carbon / carbon composite material crucible for pulling silicon single crystal material, the size of the crucible is Φ500×450mm.

[0044] (1) Pre-coating: Place the prepared carbon fiber mesh needle-punched crucible preform in the reaction chamber of a chemical vapor deposition furnace, and preheat it for 30 minutes at a high temperature of 1000°C and a low-pressure vacuum of 3000Pa; To dilute the protective gas, pass through methyltrichlorosilane: N 2 :H 2 The mixed gas with a volume ratio of 10:20:1 penetrates into the interior of the preform, and the pyrolysis product is deposited on the surface of the carbon fiber, N 2 The gas flow rate is 1000ml / min, the ventilation reaction time is 60min, and the silicon carbide inner coating ≥10μm is obtained, and then deposited and densified, and the coated carbon fiber crucible preform and tools are placed in the reaction chamber of the chemical vapor deposition furnace. Under the condition of high temperature of 1000...

Embodiment 2

[0051] A carbon / carbon composite material crucible for purifying and melting polysilicon is prepared, and the size of the crucible is Φ600×600mm.

[0052] (1) Inner coating and deposition densification: place the prepared carbon fiber braided crucible prefabricated body in the reaction chamber of a chemical vapor deposition furnace, and preheat it for 5 minutes at a high temperature of 900°C and a low pressure vacuum of 100Pa; then prepare the inner coating Layer, with nitrogen and hydrogen as diluted protective gas, pass through methane: tetrachlorosilane: N 2 :H 2 The mixed gas with a volume ratio of 10:10:10:1 penetrates into the interior of the preform, and the pyrolysis product is deposited on the surface of the carbon fiber, N 2 The air flow rate is 100ml / min, the aeration reaction time is 300min, and a ≥5μm silicon carbide inner coating is obtained. Then deposit and densify, put the coated carbon fiber crucible preform and tooling in the reaction chamber of the chemic...

Embodiment 3

[0059] Prepare a carbon / carbon composite material crucible for polycrystalline silicon ingots, the size of which is 800×800×600 mm.

[0060] (1) Inner coating and deposition densification: place the prepared carbon fiber cloth laminated crucible prefabricated body in the reaction chamber of a chemical vapor deposition furnace, preheat it for 15 minutes at a high temperature of 1500 ° C, and a low pressure vacuum of 6000 Pa; then prepare For the inner coating, use nitrogen and hydrogen as the diluted protective gas, and pass through methyltrichlorosilane: N 2 :H 2 The mixed gas with a volume ratio of 10:10:1 penetrates into the interior of the preform, and the pyrolysis product is deposited on the surface of the carbon fiber, N 2 The gas flow rate is 2000ml / min, the aeration reaction time is 100min, obtain a silicon carbide-rich inner coating ≥ 20μm, and then deposit and densify it. The coated carbon fiber crucible preform and tools are placed in the reaction chamber of the ch...

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Abstract

The invention relates to a sticky product with silicon erosion resistance of a carbon / carbon composite material and a preparation method thereof. The method comprises the steps of: putting a carbon fiber precast body into a reaction chamber of a vacuum high-temperature furnace; depositing an inner coating containing silicon carbide at the surface of a carbon fiber; depositing pyrolytic carbon at the surface of the carbon fiber to prepare a carbon / carbon composite material billet; putting into a vacuum autoclave and an atmospheric carbonization furnace, carrying out vacuum impregnation of resin, pressurized solidification, and normal-pressure carbonization; continuing to fill resin carbon in a residual hole inside the billet to obtain the compact carbon / carbon composite material billet; finally putting into a vacuum high-temperature furnace; and carrying out high-temperature graphite purification treatment and overall coating of an outer coating containing silicon carbide, so as to prepare the sticky product with silicon erosion resistance of the carbon / carbon composite material.

Description

technical field [0001] The invention relates to a carbon / carbon composite material product resistant to silicon erosion and adhesion and a preparation method thereof, belonging to the technical field of composite materials. technical background [0002] Carbon graphite is a material composed of carbon elements. It has good electrical conductivity, thermal conductivity, corrosion resistance, radiation resistance, high and low temperature resistance, etc., especially has outstanding advantages such as high temperature resistance, stable chemical properties, and no pollution to high-purity semiconductor materials. The development of semiconductors is inseparable from the application of carbon graphite materials in the semiconductor industry. In the 21st century, the photovoltaic industry has developed rapidly, and the output and market of polycrystalline silicon ingot materials for solar cells have increased by leaps and bounds, which also provides graphite products with a prom...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/83C04B35/622
Inventor 刘汝萃刘汝强
Owner 山东道普安制动材料有限公司
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