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Diamond energy transmission window for short millimeter wave traveling tubes and manufacturing method of diamond energy transmission window

A diamond and millimeter wave technology, applied in the field of diamond energy transmission window and its manufacturing, can solve the problems of high dielectric constant, poor matching performance, insufficient strength, etc., and achieve the effects of low reflection loss, stable working performance, and improved output power

Active Publication Date: 2013-08-07
NO 12 RES INST OF CETC
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Problems solved by technology

[0003] The technical problem solved by the present invention is that in order to make the short millimeter wave traveling wave tube work stably, the short millimeter wave energy transmission window material usually selected is sapphire, but the problems of sapphire are high dielectric constant, insufficient strength, poor matching performance and Defects such as large loss

Method used

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  • Diamond energy transmission window for short millimeter wave traveling tubes and manufacturing method of diamond energy transmission window
  • Diamond energy transmission window for short millimeter wave traveling tubes and manufacturing method of diamond energy transmission window

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Embodiment Construction

[0019] refer to figure 1 , showing a schematic diagram of a diamond energy transmission window for a W-band traveling wave tube. In the figure, component 2 is a diamond window, which is connected with the upper window frame 1 and the lower window frame 3 by brazing to form a vacuum seal. The preparation of the main component diamond window material is carried out according to the following steps:

[0020] a. Select the substrate silicon wafer, and polish the surface with diamond powder to nucleate;

[0021] b. The substrate is loaded into the microwave plasma chemical vapor deposition equipment, and the system is evacuated to ≤1x10 -1 Pa;

[0022] c. Filling with hydrogen gas - flow rate 100~600sccm, air pressure 400~800Pa;

[0023] d. Add microwave power of 1000W to start plasma discharge;

[0024] e. Increase the air pressure and microwave power to 10-16KPa and 2-3KW, and the substrate temperature reaches 850-950°C;

[0025] f. Add methane-1~6 sccm to start the growth o...

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Abstract

The invention discloses a diamond energy transmission window for short millimeter wave traveling tubes and a manufacturing method of the diamond energy transmission window and belongs to the technical field of vacuum electronics. The diamond energy transmission window comprises an energy transmission window leaf, a connecting wave guide and sealing window frames. The sealing window frames connected with the waveguide are symmetrically arranged on the upper and lower portion of the diamond energy transmission window, and the diamond window leaf is hermetically clamped between the window frames. The manufacturing method of the diamond energy transmission window includes: a, selecting a substrate silicon wafer; b, installing the substrate silicon wafer in a microwave plasma chemical vapor deposition device; c, inflating hydrogen gas; d, starting plasma discharging; e, increasing air pressure and microwave power and increasing substrate temperature to 850-950 DEG C; f, adding methane and starting growing diamond; g, finishing growing and taking out of diamond materials; h, grinding, polishing and cutting to obtain the window leaf by laser; i, metalizing the window leaf; and j, welding the window leaf and the window frames by centering. The diamond energy transmission window is superior to sapphire windows in both matching performance and transmission loss.

Description

technical field [0001] The invention belongs to the technical field of vacuum electronics, and in particular relates to a diamond energy transmission window for a short millimeter wave traveling wave tube and a manufacturing method thereof. Background technique [0002] Terahertz (THz) vacuum devices in the millimeter wave band and higher frequency bands have the advantages of high power and wide frequency bandwidth, and have been widely used in radar, guidance, tactical and strategic communications, electronic countermeasures, remote sensing, and radiation measurement. Due to the relatively high frequency of this traveling wave tube and the small size of the parts, it brings various difficulties to product development, especially the processing and manufacturing of slow wave structures, attenuators and microwave energy transmission windows where the size requirements are more stringent. . The energy transmission window is one of the important components in the short millim...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J23/36H01J9/00
Inventor 丁明清杜英华李莉莉冯进军胡银富蔡军
Owner NO 12 RES INST OF CETC
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