Process for plating precious metal film on porous ceramic based on magnetron sputtering through vacuum plating

Abstract

The invention discloses a process for plating a precious metal film on a porous ceramic based on magnetron sputtering through vacuum plating. The process comprises the following steps: placing the porous ceramic in a vacuum chamber of a magnetron sputtering device; pumping out air in the vacuum chamber, and when the vacuum degree of the inside of the vacuum chamber is less than 5*10<-2> Pa, inflating an inert gas with a preset concentration into the vacuum chamber; galvanizing a metal target is galvanized and carrying out sputter coating; enabling ions generated by the metal target to collide with argon atoms in the process of flying to the surface of the porous ceramic in an accelerated mode under the action of electric fields so as to ionize large amounts of argon ions and electrons, and enabling the electrons fly to the surface of the porous ceramic; enabling the argon ions to bombard the metal target in an accelerated mode under the action of electric fields so as to sputter a large number of target atoms or molecules of the metal target, and depositing neutral target atoms or molecules on the surface of the porous ceramic so as to form a precious metal thin film with the thickness of 1-15 mu m; introducing the atmosphere or other preset gas into the vacuum chamber, and taking out a workpiece. According to the invention, the tightness and homogeneity of prepared porous ceramic coated films can be improved.

Description

technical field [0001] The invention belongs to the technical field of coating technology, and relates to a vacuum coating technology for ceramics, in particular to a technology for vacuum coating precious metal films on porous ceramics based on magnetron sputtering. Background technique [0002] Among the many new energy sources, hydrogen energy will become the most ideal energy source in the 21st century. This is because, in the case of burning the same weight of coal, gasoline and hydrogen, hydrogen produces the most energy, and the product of its combustion is water, without ash and waste gas, and will not pollute the environment; while the combustion of coal and oil produces These are carbon dioxide and sulfur dioxide, which produce the greenhouse effect and acid rain, respectively. The reserves of coal and oil are limited, while hydrogen is mainly stored in water, and the only product after combustion is water, which can continuously produce hydrogen and never run out...

AI Technical Summary

Problems solved by technology

[0016] The palladium membrane separation process requires the use of ceramic palladium membrane. The existing ceramic palladium membrane preparation process usually uses electroless plating or electroplating. The prepared ceramic palladium membrane is thin, poor in precision and homogeneity, and the thickness of the metal film is uneven. , not yet adequate for the task of hydrogen separation

[0017] In view of this, there is an urgent need to design a new coating process to prepare ceramic metal films to overcome the defects of the existing ceramic metal films of insufficient precision and homogeneity

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