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Single-surface friction power generator based on transverse friction and preparation method of single-surface friction power generator

A surface friction and generator technology, applied in the direction of friction generators, processes for producing decorative surface effects, manufacturing of microstructure devices, etc., can solve problems such as unfavorable processing integration, and achieve easy integrated processing, simple process, and low cost. Effect

Inactive Publication Date: 2013-10-02
PEKING UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the above-mentioned frictional nanogenerators all utilize vibration in the vertical direction, and the output electrodes are located on two friction plates, which is not conducive to processing and integration.

Method used

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  • Single-surface friction power generator based on transverse friction and preparation method of single-surface friction power generator
  • Single-surface friction power generator based on transverse friction and preparation method of single-surface friction power generator
  • Single-surface friction power generator based on transverse friction and preparation method of single-surface friction power generator

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Embodiment

[0027] Example: such as Figure 1 to Figure 5 As shown, it includes a conductive layer 1, an aluminum electrode 2 with a grid structure, an aluminum electrode nanostructure layer 2-1, a PTFE film layer 3, and a film nanostructure layer 3-1. The preparation steps are as follows:

[0028] Step 1: using the positive plasma generated by the reactive ion etching process to bombard the surface of the PTFE film layer 3 to form an irregular thin film nanostructure layer 3-1 on one side of the PTFE film layer 3 .

[0029] Step 2: using sputtering or evaporation or a chemical vapor deposition process to form a complete aluminum electrode on the surface of the thin film nanostructure layer 3-1;

[0030] Step 3: using a photoresist mask to realize a patterned metal electrode by photolithography, so as to obtain an aluminum electrode 2 with a grid structure;

[0031] Step 4: Use water bath heating method to obtain aluminum electrode nanostructure layer 2-1 on the surface of aluminum elect...

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Abstract

The invention relates to the technical field of MEMS (Micro-electro-mechanical System) integration processing, in particular to a single-surface friction power generator based on transverse friction and a preparation method of the single-surface friction power generator. The single-surface friction power generator is formed in a manner that two identical structures are arranged in a relatively and mutually horizontal friction manner, wherein each structure comprises five layers; conducting layers are arranged at the outermost layers; thin film layers are adjacent to the conducting layers; thin film nano structure layers are arranged on the other sides of the thin film layers; metal electrodes are arranged on the other sides of the thin film nano structure layers; and metal electrode nano structure layers are arranged on the other sides of the metal electrodes. The single-surface friction power generator has the advantages that compared with the traditional two-layer thin film power generator in a vertical direction, the single-layer structure uses friction in a horizontal direction, and electrode outputs are in the same plane, so that subsequent processing and integration are facilitated; the nano power generator and the preparation method thereof are simple in technology, low in cost, high in productivity, and easy to integrate and process; mass production is available; and the novel structure effectively uses the friction in the horizontal direction in nature.

Description

technical field [0001] The invention relates to the technical field of MEMS integrated processing, in particular to a single-surface friction generator based on lateral friction and a preparation method thereof. Background technique [0002] Micro-electro-mechanical system (MEMS) is a high-tech multi-field interdisciplinary subject. It has developed rapidly in recent years and has received extensive attention. Micro-electro-mechanical systems refer to small devices with a size of less than a centimeter or even smaller, and are mainly composed of sensors, actuators, and micro-energy sources. Due to the gradual reduction in the size of MEMS devices, the development of the micro-energy part is far from meeting the current needs. Based on the research of energy harvesters that convert the energy (mechanical energy, thermal energy, solar energy, etc.) existing in the environment into electrical energy, a feasible solution for the energy supply of MEMS devices is proposed. Among...

Claims

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Application Information

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IPC IPC(8): H02N1/04B81C1/00
Inventor 张海霞刘雯韩梦迪孙旭明孟博
Owner PEKING UNIV
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