A kind of tb, mn and cu ternary co-doped bifeo3 film with low leakage current and preparation method thereof
A leakage current and co-doping technology, which is applied in the field of low leakage current BiFeO3 film and its preparation, can solve the problems of limited application, low dielectric constant, large leakage current, etc., to improve multiferroic performance, reduce leakage current, The effect of enhancing insulation
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Embodiment 1
[0024] 1) The Bi(NO 3 ) 3 ·5H 2 O, Fe(NO 3 ) 3 ·9H 2 O, Tb(NO 3 ) 3 ·6H 2 O, C 4 H 6 MnO 4 ·4H 2 O and Cu (NO 3 ) 2 ·3H 2 O is dissolved in a mixture of ethylene glycol methyl ether and acetic anhydride in a molar ratio of 0.94:0.95:0.11:0.04:0.01, and then stirred for 2h to make it uniform to obtain BiFeO 3 Precursor fluid; Among them, BiFeO 3 The total metal ion concentration in the precursor solution is 0.3mol / L; the volume ratio of ethylene glycol methyl ether and acetic anhydride in the mixed solution is 3:1;
[0025] 2) The BiFeO 3 The precursor liquid is allowed to stand for 24 hours, and then BiFeO is spin-coated on the FTO / glass substrate 3 The precursor solution prepares the wet film. The wet film is baked at 200°C for 12 minutes to obtain a dry film, and then fast annealed at 550°C for 8 minutes to obtain crystalline BiFeO 3 film;
[0026] 3) BiFeO to be crystalline 3 After the film is cooled, repeat step 2) to make the crystalline BiFeO 3 Reach the required thickness, tha...
Embodiment 2
[0028] 1) The Bi(NO 3 ) 3 ·5H 2 O, Fe(NO 3 ) 3 ·9H 2 O, Tb(NO 3 ) 3 ·6H 2 O, C 4 H 6 MnO 4 ·4H 2 O and Cu (NO 3 ) 2 ·3H 2 O is dissolved in a mixture of ethylene glycol methyl ether and acetic anhydride in a molar ratio of 0.94:0.94:0.11:0.04:0.02, and then stirred for 2h to make it uniform to obtain BiFeO 3 Precursor fluid; Among them, BiFeO 3 The total metal ion concentration in the precursor solution is 0.3mol / L; the volume ratio of ethylene glycol methyl ether and acetic anhydride in the mixed solution is 3:1;
[0029] 2) The BiFeO 3 The precursor liquid is allowed to stand for 32 hours, and then BiFeO is spin-coated on the FTO / glass substrate 3 The precursor solution prepares a wet film. The wet film is baked at 200°C for 6 minutes to obtain a dry film, and then rapidly annealed at 550°C for 13 minutes to obtain crystalline BiFeO 3 film.
[0030] 3) BiFeO to be crystalline 3 After the film is cooled, repeat step 2) to make the crystalline BiFeO 3 Reach the required thickness, th...
Embodiment 3
[0037] 1) The Bi(NO 3 ) 3 ·5H 2 O, Fe(NO 3 ) 3 ·9H 2 O, Tb(NO 3 ) 3 ·6H 2 O, C 4 H 6 MnO 4 ·4H 2 O and Cu (NO 3 ) 2 ·3H 2 O is dissolved in a mixture of ethylene glycol methyl ether and acetic anhydride in a molar ratio of 0.91:0.95:0.14:0.04:0.01, and then stirred for 2h to make it uniform to obtain BiFeO 3 Precursor fluid; Among them, BiFeO 3 The total metal ion concentration in the precursor solution is 0.1 mol / L; the volume ratio of ethylene glycol methyl ether and acetic anhydride in the mixed solution is 1:1;
[0038] 2) The BiFeO 3 The precursor liquid is allowed to stand for 30 hours, and then BiFeO is spin-coated on the FTO / glass substrate 3 The precursor solution prepares the wet film. The wet film is baked at 260°C for 8 minutes to obtain a dry film, and then fast annealed at 550°C for 10 minutes to obtain crystalline BiFeO 3 film;
[0039] 3) BiFeO to be crystalline 3 After the film is cooled, repeat step 2) to make the crystalline BiFeO 3 Reach the required thickness, th...
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