A kind of preparation method of flexible ultra-thin glass

An ultra-thin glass and flexible technology, applied in glass manufacturing equipment, glass molding, glass production, etc., can solve problems that affect product processing performance, micro-waviness warping, point defects, etc., and achieve strong application potential, The effect of strong flexibility and simple preparation method

Active Publication Date: 2016-06-08
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] From the research and development of ultra-thin glass above, it can be seen that both domestic and foreign countries have made great progress in the process of manufacturing ultra-thin glass, but with the development of science and technology and the increase of people's living needs, the demand for ultra-thin glass will continue to grow The performance requirements for ultra-thin glass will also be higher and higher, but the traditional methods of preparing ultra-thin glass have different shortcomings, such as point defects in the preparation of float glass affected by the molding environment, Thickness difference, microscopic waviness and warpage, etc., directly affect the processing and end-use performance of the product, so no matter the defects inside the glass or the glass appearance, further measures need to be taken to improve

Method used

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  • A kind of preparation method of flexible ultra-thin glass
  • A kind of preparation method of flexible ultra-thin glass
  • A kind of preparation method of flexible ultra-thin glass

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0036] according to figure 1 The process flow of the chemical vapor deposition technology shown in the preparation of ultra-thin glass, the specific steps are as follows:

[0037] 1. Put the tin nugget into the molding slot.

[0038] 2. Put the molding tank into the reaction chamber of the chemical vapor deposition system, and adjust the temperature of the chamber to 300°C;

[0039] 3. Turn on the mechanical pump in turn to pump the low vacuum of the reaction chamber to about 1Pa;

[0040] 4. Introduce argon gas, the flow rate is 45sccm, adjust the chamber pressure to 30Pa; turn on the radio frequency power supply, set the radio frequency power to 200W;

[0041] 5. Introduce ammonia gas with a flow rate of 40 sccm; after the pressure stabilizes, inject silane with a total flow rate of 20 sccm; finally readjust the reaction pressure to 30 Pa;

[0042] 6. Control the growth time for 60 minutes to prepare silicon nitride film;

[0043] 7. Stop feeding ammonia gas.

[0044] 8...

Embodiment 2

[0051] according to figure 1 The process flow of the chemical vapor deposition technology shown in the preparation of ultra-thin glass, the specific steps are as follows:

[0052] 1. Put the tin nugget into the molding slot.

[0053] 2. Put the molding tank into the reaction chamber of the chemical vapor deposition system, and adjust the temperature of the chamber to 500°C;

[0054] 3. Turn on the mechanical pump in turn to pump the low vacuum of the reaction chamber to about 1Pa;

[0055] 4. Introduce argon gas, the flow rate is 45sccm, adjust the chamber pressure to 200Pa; turn on the radio frequency power supply, set the radio frequency power to 200W;

[0056] 5. Introduce ammonia gas with a flow rate of 40 sccm; after the pressure stabilizes, inject silane with a total flow rate of 20 sccm; finally readjust the reaction pressure to 200 Pa;

[0057] 6. Control the growth time for 120 minutes to prepare silicon nitride film;

[0058] 7. Stop feeding ammonia gas.

[0059...

Embodiment 3

[0066] according to figure 2 The shown cullet fusing method process is used to prepare ultra-thin glass, and the specific steps are as follows:

[0067] 1. Put the tin block into the molding tank and heat the molding tank to 950°C.

[0068] 2. Sprinkle the broken glass powder with a particle size of 10μm evenly on the surface of the molten tin and melt it immediately.

[0069] 3. Cool the temperature of the molding tank and control it at 280°C.

[0070] 4. Remove the glass after the molten glass on the surface solidifies.

[0071] 5. Use a polishing machine for polishing.

[0072] The SEM image of the flexible ultra-thin glass obtained through the above process and the graph of the variation of transmittance with wavelength are similar to those in Example 1.

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Abstract

The invention discloses a method for preparing flexible ultra-thin glass. Using chemical vapor deposition technology, firstly prepare a layer of silicon nitride film on a tin solution with a low melting point, then prepare a layer of silicon dioxide film, and finally extract Si 3 N 4 / SiO 2 Film, according to the use of flexible glass for the corresponding polishing treatment. The invention also discloses a preparation method of the flexible ultra-thin glass, which adopts the fusing technology of broken glass powder. The preparation method of the two kinds of flexible ultra-thin glasses of the present invention is simple, the source of production raw materials is abundant, and the price is cheap, and the flexible ultra-thin glass with a thickness of 1 μm to 50 μm can be obtained, and the obtained ultra-thin glass has high flexibility and good light transmittance. The flexible ultra-thin glass obtained by the invention has extremely strong application potential and can be widely used in the field of TFT-LCD liquid crystal display and new energy fields such as thin film solar cells.

Description

technical field [0001] The invention relates to the field of production and processing of ultra-thin glass, in particular to a method for preparing flexible ultra-thin glass used in the fields of microelectronic components and thin-film solar cells. Background technique [0002] Ordinary glass is generally made of quartz sand, soda ash, feldspar and limestone at high temperature. During the cooling process, the viscosity of the melt gradually increases and brittle and transparent solid materials without crystallization can be obtained, such as: quartz glass, silicate glass, soda lime glass, fluoride glass, etc. Among them, silicate glass is obtained by using quartz sand, soda ash, feldspar and limestone as raw materials, after mixing, high-temperature melting, homogenization, processing and forming, and then annealing, it is widely used in construction, daily use, medical treatment, chemistry, etc. , electronics, instrumentation, nuclear engineering and other fields. [00...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C03B19/00C03B18/02
CPCY02P40/57
Inventor 万青郭立强杨园园竺立强张洪亮吴国栋
Owner NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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