Glass-ceramic target material and preparation method thereof

Abstract

The invention discloses a glass ceramic target material and a preparation method thereof. The glass ceramic target material comprises an alloy backboard and a glass ceramic body, wherein the alloy backboard is made of high-temperature-resistant nickel base alloy; the glass ceramic body is prepared by transferring glass ceramic powder onto the glass ceramic body by virtue of a screen printing process and then sintering the glass ceramic powder; the alloy backboard and the glass ceramic body are combined in a solid-phase diffusion manner. The preparation method comprises the following steps: mixing all raw material powder, smelting at a high temperature, quenching and carrying out ball grinding, drying and screening so as to obtain glass powder; mixing the glass powder with an organic carrier and carrying out ball grinding so as to obtain a glass paste; printing the glass paste on the alloy backboard by virtue of a silk screen, drying and then sintering; repeatedly carrying out the steps until obtaining the glass ceramic body with required thickness, and polishing the surface of the glass ceramic body so as to obtain the glass ceramic target material. According to the method, the electrical conductivity and thermal conductivity of the alloy backboard are comprehensively utilized, so that the risk of cracking failure of the target material during processes of charge accumulation and cooling of the target material is reduced.

Description

technical field [0001] The invention belongs to the technical field of target material and its manufacture, and in particular relates to a glass ceramic target material for magnetron sputtering and a preparation method thereof. Background technique [0002] Magnetron sputtering is one of the main technologies for preparing thin film materials, and the raw material for sputtering deposited thin films is the target. Thin films deposited by sputtering with targets have high density and good adhesion, and have been widely used. Targets can be divided into three types according to their components: metal targets, alloy targets and ceramic compound targets. Glass ceramics is a new type of composite material that is different from the above three types of materials. Due to its advantages such as high mechanical strength, adjustable thermal expansion performance, chemical corrosion resistance, and low dielectric loss, it is widely used in machinery manufacturing, optics, electronic...

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Problems solved by technology

Therefore, glass-ceramic targets are not suitable for preparation by traditional casting and powder metallurgy methods.

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