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A kind of preparation method of composite coating superimposed by metal and metal carbide

A metal carbide and composite coating technology, applied in the surface field, can solve the problems of hydrogen halide and other products polluting the environment, expensive gas sources, equipment corrosiveness, etc., and achieve the effects of facilitating industrial production, reducing stress, and improving binding force.

Active Publication Date: 2017-02-08
NO 59 RES INST OF CHINA ORDNANCE IND
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Tantalum coatings and tungsten coatings are currently mainly prepared by chemical vapor deposition. The deposition rate is high, but the gas source is expensive, corrosive to equipment, and the generated hydrogen halides and other products pollute the environment.

Method used

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  • A kind of preparation method of composite coating superimposed by metal and metal carbide
  • A kind of preparation method of composite coating superimposed by metal and metal carbide

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0021] Embodiment 1: a kind of preparation method of the composite coating of metal and metal carbide overlay, comprises the following steps:

[0022] (1) Pretreatment of C / C composite parts: heating and baking at 200°C for 12h. Take it out within 2 hours and use oil-free and water-free high-pressure argon for dust blowing treatment, then put it into a vacuum greater than 6×10 -2 Pa ion plating vacuum chamber.

[0023] (2) Sputtering cleaning before coating: put it in the vacuum chamber of arc ion plating equipment, heating temperature 160°C, vacuum degree 4×10 -2 Pa, adjust the duty cycle to 0.5, negative bias voltage to 600V, clean for 50s, then adjust the duty cycle to 0.6, negative bias voltage to 850V, and clean for 50s.

[0024] (3) Deposition coating process: argon gas is passed, and the vacuum degree is kept at 4×10 -1 Pa, adjust the duty cycle to 0.5, negative bias voltage 200V, ignite the tantalum target, the arc current is 180A, after 20 minutes of deposition, tu...

Embodiment 2

[0025] Embodiment 2: a kind of preparation method of the composite coating superimposed of metal and metal carbide, comprises the following steps:

[0026] (1) Pretreatment of C / C composite parts: heating and baking at 250°C for 8h. Take it out within 2 hours and use oil-free and water-free high-pressure argon for dust blowing treatment, then put it into a vacuum greater than 6×10 -2 Pa ion plating vacuum chamber.

[0027] (2) Sputtering cleaning before coating: put it in the vacuum chamber of arc ion plating equipment, heating temperature 180°C, vacuum degree 6×10 -2 Pa, adjust the duty cycle to 0.6, negative bias voltage to 650V, clean for 50s, then adjust the duty cycle to 0.6, negative bias voltage to 850V, and clean for 50s.

[0028] (3) Deposition coating process: argon gas is passed, and the vacuum degree is kept at 4×10 -1 Pa, adjust the duty cycle to 0.6, negative bias voltage 250V, ignite the molybdenum target arc, the arc current is 205A, after 20 minutes of depo...

Embodiment 3

[0029] Embodiment 3: a kind of preparation method of the composite coating superimposed of metal and metal carbide, comprises the following steps:

[0030] (1) Pretreatment of C / C composite parts: heating and baking at 300°C for 4h. Take it out within 2 hours and use oil-free and water-free high-pressure argon for dust blowing treatment, then put it into a vacuum greater than 6×10 -2 Pa ion plating vacuum chamber.

[0031] (2) Sputtering cleaning before coating: put it in the vacuum chamber of arc ion plating equipment, heating temperature 200°C, vacuum degree 6×10 -2Pa, adjust the duty cycle to 0.6, negative bias voltage to 650V, clean for 50s, then adjust the duty cycle to 0.6, negative bias voltage to 850V, and clean for 50s.

[0032] (3) Deposition coating process: argon gas is passed, and the vacuum degree is kept at 4×10 -1 Pa, adjust the duty cycle to 0.8, negative bias voltage 300V, ignite the tungsten target arc, the arc current is 210A, after 20 minutes of deposit...

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Abstract

The invention relates to a preparation method of a metal and metal carbide superimposed composite coating layer, mainly aims at ultra high temperature protection of a C / C composite material, and designs a low-stress alternating coating layer structure, wherein a part is put into a vacuum chamber of an electric arc ion plating device, the part is taken out through stages of vacuum pumping, argon introduction, sputtering cleaning with addition of negative bias, alternate introduction of protective gas or mixed gas of the protective gas and reaction gas, arc striking, coating layer deposition, power outage, cooling and the like to obtain the coating layer; the coating layer structure can effectively allow the stress in the coating layer to be reduced at the temperature of 2273-3473 K, and prevents the tantalum carbide coating layer from cracking; at the same time, the electric arc ion plating method is provided, superimposed deposition of the alternated coating layer can be carried out in the vacuum chamber without transferring the part, no pollution product is discharged, and the method is environmentally friendly; with the additional bias in sputtering cleaning and deposition before coating, the binding power can be effectively improved, and the deposition rate is higher. The preparation method has quite simple and convenient process and operation, and is convenient for industrialized production.

Description

technical field [0001] The invention relates to a method for preparing a metal and carbide coating, in particular to a method for preparing a composite coating in which a high-melting-point metal and carbides of the metal or other high-melting-point metals are superimposed on each other. The invention is suitable for high temperature protection of C / C composite material parts and belongs to the field of surface technology. Background technique [0002] C / C composite material has excellent high-temperature mechanical properties and is the only structural material that can be used above 2000K, but it is easy to oxidize when it is above 643K, which greatly limits its application. Prepare a layer of anti-oxidation coating on its surface layer, which can effectively improve the high temperature oxidation resistance of C / C composites. At present, below 1923 K, there are mature coating protection systems and preparation methods. At 2273 K and higher, the protective effect has bee...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/16C23C14/22
CPCC23C14/165C23C14/22
Inventor 吴护林孙彩云李忠盛张隆平陈晓琴陈大军
Owner NO 59 RES INST OF CHINA ORDNANCE IND