Method for manufacturing thin film capacitor with anodic oxidation film as dielectric layer
An anodized film, film capacitor technology, applied in capacitor manufacturing, capacitors, circuits, etc., can solve the problems of complex production process of air bridge, complex equipment and process, poor film compactness, etc., to achieve capacitance value and withstand voltage value The effect of easy adjustment of size, good electrical properties, and low manufacturing cost
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[0057] On a sapphire substrate 1 with a thickness of 0.254mm, a Ta film is deposited as a metal film 2 by magnetron sputtering, and the thickness of the Ta film is about 300nm, such as figure 1 shown.
[0058] The metal thin film 2 is patterned by a photolithographic etching process to form the lower electrode 202 and the first lower electrode lead-out line 201, such as figure 2 shown. Among them, Ta corrosion solution uses HF buffer solution.
[0059] A photoresist was spin-coated on the bottom electrode 202 and the first bottom electrode lead-out line 201, and an anodic oxidation mask was formed by a photolithography process. The thickness of the patterned anodic oxidation mask 3 was 8 microns. The anodization mask 3 completely covers the first lower electrode lead-out lines 201 to prevent the first lower electrode lead-out lines 201 from being oxidized during anodization. The opening area of the anodic oxidation mask 3 is larger than the lower electrode 202 so as to e...
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