Collimating lens rear surface self-calibration co-light-path interferometer based on acoustic-optical heterodyning phase shifting
A technology of collimating mirror and interferometer, applied in the field of optics, can solve the problems that the accuracy cannot meet the requirements of high-precision measurement, the development of tunable lasers is difficult, the difficulty and cost of making reference mirrors are high, and it is beneficial to solve the phase, Overcome the influence of noise and other factors, the difficulty of development and the effect of cost reduction
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[0028] Example
[0029] figure 1 It is a schematic diagram of a self-calibrated common optical path interferometer based on the back surface of the collimating lens based on acousto-optic heterodyne phase shifting according to an embodiment of the present invention. Such as figure 1 As shown, it mainly includes:
[0030] Laser, first and second polarization beam splitters, first, second and third acousto-optic frequency shifters, first and second mirrors, beam combiners, spatial filters, point diffraction light wave generators, first beam splitters Mirror, collimating lens, fiber optic head, right-angle prism or second beam splitter, imaging mirror and area array detector; the collimating lens is composed of one or a group of lenses, the last surface of which is designed as a plane, which is referred to as Is the final plane of the collimator lens;
[0031] Wherein, the emitted light of the laser passes through the first and second polarizing beamsplitters to be split into three be...
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