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Silicon carbon window layer film with refractive index gradient characteristics and application

A technology of gradient refractive index and window layer, which is applied in coating, final product manufacturing, metal material coating process, etc., and can solve problems affecting battery performance and other issues

Inactive Publication Date: 2015-02-18
NANKAI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Another part of the optical loss of traditional silicon-based thin film cells is the part that is reflected by the front electrode or the window layer before reaching the intrinsic layer. To solve this problem, most research institutions adopt the method of covering the p-a-SiC:H window layer A layer of transparent conductive film (ITO) whose refractive index is smaller than that of the window layer plays the role of front electrode and anti-reflection at the same time, but because the p-a-SiC:H window layer has a single substance structure and has a fixed and unique refractive index, when the solar spectrum When incident on a thin-film battery, only light with a specific wavelength can achieve ideal zero reflection, and the optical reflection loss in most of the spectral range is still obvious in the actual battery, which in turn affects the performance of the entire battery

Method used

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  • Silicon carbon window layer film with refractive index gradient characteristics and application
  • Silicon carbon window layer film with refractive index gradient characteristics and application
  • Silicon carbon window layer film with refractive index gradient characteristics and application

Examples

Experimental program
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Effect test

Embodiment 1

[0026] A method for preparing a silicon-carbon window layer thin film with a graded refractive index feature:

[0027] Put the sample to be processed into a high-vacuum plasma-enhanced chemical vapor phase RF-PECVD deposition equipment, the reaction temperature is 100 ° C, the reaction gas source is a mixed gas of silane, borane, hydrogen and methane, and the percentage of hydrogen in the gas volume flow rate is 98.55% %, the percentage of silane in gas volume flow is 0.75%, the percentage of borane in gas volume flow is 0.1%, the percentage of methane in gas volume flow is 0.6%, and the initial glow power density is 20 mW / cm 2 , as the thickness of the deposited film increases, the glow power density increases gradually to 50 mW / cm according to: P(t)=20+1.15t, where P(t) is the glow power density, and t is the deposition time 2 , the final glow deposition thickness is 30 nm, and the refractive index at the wavelength of 400 nm increases from 2.8 to 2.2 in the longitudinal gro...

Embodiment 2

[0033] A method for preparing a silicon-carbon window layer thin film with a graded refractive index feature:

[0034] Put the sample to be processed into a high-vacuum microwave plasma chemical vapor deposition system, the reaction temperature is 150°C, and the reaction gas source is a mixed gas of silane, borane, hydrogen and methane, of which hydrogen accounts for 98% of the gas volume flow rate, and silane accounts for The percentage of gas volume flow is 1%, the percentage of borane in gas volume flow is 0.2%, the percentage of methane in gas volume flow is 0.8%, and the glow power density is initially 10 mW / cm 2 , as the thickness of the deposited film increases, the glow power density increases gradually to 40 mW / cm according to: P(t)=10+1.5t, where P(t) is the glow power density, and t is the deposition time 2 , the final glow deposition thickness is 30 nm, and the refractive index at the wavelength of 400 nm increases from 2.8 to 2.2 in the longitudinal growth directi...

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Abstract

The invention discloses a silicon carbon window layer film with refractive index gradient characteristics and application. The carbon content of the film ranges from 30% to 80%, low discharge power density adjacent to the intrinsic layer is adopted, and the discharge power density is increased gradually with the increase of the thickness of the film according to a formula that P (t) = P0 + A*t, the P is the discharge power, the P0 is the initial power density, the A is a linear rate, the t is the discharge time, discharge power density longitudinal gradient change is implemented finally, and the change of the refractive index at the 400nm wavelength ranges from 2.8 to 2.2; the film is applied to silicon film solar batteries. The film has the advantages that the optical band gap of material ranges from 2.0 to 3.7eV, the electrical conductivity ranges from 0.1 to 5.0 omega*cm, the window layer optical loss is reduced effectively, the filling factors, open circuit voltage and short wave response speed of a solar battery can be increased significantly, and the photoelectric conversion efficiency is improved finally.

Description

technical field [0001] The invention belongs to the field of silicon-based thin-film solar cells, in particular to a silicon-carbon window layer thin film with a refractive index gradient feature and its application. Background technique [0002] Facing the increasingly severe energy shortage problem in the world, solar cells have increasingly become one of the important means to solve environmental and energy problems because of their clean and non-polluting characteristics. Silicon-based solar cells are the most researched and most mature technology because of the abundant, non-toxic and non-polluting semiconductor material silicon used. Among them, silicon-based thin-film solar cells have become an important direction for the development of solar cells in the future due to their short industrial chain, low manufacturing cost, low energy consumption, and pollution-free manufacturing process. [0003] The p-type doped layer acts as a window layer of the silicon-based thin...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/0216H01L31/20H01L31/0445H01L31/075C23C16/22C23C16/513
CPCC23C16/32C23C16/513H01L31/02168H01L31/075H01L31/20Y02E10/548Y02P70/50
Inventor 倪牮马峻张建军侯国付陈新亮张晓丹赵颖
Owner NANKAI UNIV
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