Nonstoichiometric lanthanum titanate polycrystalline coating material and growth technology thereof
A non-stoichiometric ratio, lanthanum titanate technology, applied in polycrystalline material growth, single crystal growth, crystal growth, etc., can solve the problems of sputtering and reducing the surface finish of the film, and achieve dense film layers and consistent crystallization direction Good, the effect of reducing production costs
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Embodiment 1
[0021] (1) La 2 o 3 (99.999%), TiO 2 (99.9%) was placed in a muffle furnace and raised to 500°C, kept at a constant temperature for three hours to remove excess water in the raw material, cooled to room temperature, and then mixed with Ti (99.9%) by La 2 Ti 2 o 7-x The chemical composition ingredients are mixed, where x=0.5, the mixed powder is ground on a mortar or grinder to mix evenly, and pressed into blocks on an isostatic press as required;
[0022] (2) Put the briquetting material obtained in step (1) into a molybdenum crucible, transfer the molybdenum crucible to a vertical temperature gradient furnace, adjust to a suitable position, power on the whole system to heat up after sealing, start the mechanical pump, diffusion pump successively, and vacuumize to 10 -3 Pa, when the furnace temperature reaches 1400°C, fill in the inert protective gas Ar, and continue to heat up to the set temperature of 1800°C;
[0023] (3) After the furnace temperature reaches the set t...
Embodiment 2
[0025] (1) La 2 o 3 (99.999%), TiO 2 (99.9%) was placed in a muffle furnace and raised to 500°C, kept at a constant temperature for three hours to remove excess water in the raw material, cooled to room temperature, and then mixed with Ti (99.9%) by La 2 Ti 2 o 7-x The chemical composition ingredients are mixed, where x=0.9, the mixed powder is ground on a mortar or grinder to mix evenly, and pressed into blocks on an isostatic press as required;
[0026] (2) Put the briquetting material obtained in step (1) into a molybdenum crucible, transfer the molybdenum crucible to a vertical temperature gradient furnace, adjust to a suitable position, power on the whole system to heat up after sealing, start the mechanical pump, diffusion pump successively, and vacuumize to 10 -4 Pa, when the furnace temperature reaches 1700°C, fill in the inert protective gas Ar, and continue to heat up to the set temperature of 1900°C;
[0027] (3) After the furnace temperature reaches the set t...
Embodiment 3
[0029] (1) La 2 o 3 (99.999%), TiO 2 (99.9%) was placed in a muffle furnace and raised to 500°C, kept at a constant temperature for three hours to remove excess water in the raw material, cooled to room temperature, and then mixed with Ti (99.9%) by La 2 Ti 2 o 7-x The chemical composition ingredients are mixed, where x=0.7, the mixed powder is ground on a mortar or grinder to mix evenly, and pressed into blocks on an isostatic press as required;
[0030] (2) Put the briquetting material obtained in step (1) into a molybdenum crucible, transfer the molybdenum crucible to a vertical temperature gradient furnace, adjust to a suitable position, power on the whole system to heat up after sealing, start the mechanical pump, diffusion pump successively, and vacuumize to 10 -4 Pa, when the furnace temperature reaches 1600°C, fill in the inert protective gas Ar, and continue to heat up to the set temperature of 1850°C;
[0031] (3) After the furnace temperature reaches the set t...
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