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Sensitizer containing diazo group, photoresist composition and preparation method thereof

A photoresist and composition technology, applied in the field of diazo group-containing sensitizers, photoresist compositions and their preparation, can solve the problems of poor adhesion and corrosion resistance, small exposure wide capacity, poor storage stability and the like , to achieve the effect of not easy to decompose, high storage stability, and not easy to remain.

Active Publication Date: 2018-06-19
BOE TECH GRP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Of course, there are also some disadvantages, such as difficult to refine, easy to produce pinholes, poor adhesion and corrosion resistance, poor storage stability, small exposure width, etc.

Method used

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  • Sensitizer containing diazo group, photoresist composition and preparation method thereof
  • Sensitizer containing diazo group, photoresist composition and preparation method thereof
  • Sensitizer containing diazo group, photoresist composition and preparation method thereof

Examples

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Effect test

preparation example Construction

[0031] Based on the present invention, the present invention provides a curcumin photosensitizer containing diazo group capable of improving thermal stability and resolution of photoresist, a preparation method thereof and a photoresist composition containing the photosensitizer.

[0032] The curcumin sensitizer containing diazo group of the present invention has a structural formula as shown in formula I:

[0033]

[0034] The invention provides a positive photoresist composition for LCD TFT. In order to obtain higher resolution, the photoresist composition of the invention includes a film-forming resin, a photosensitive agent and an organic solvent. Wherein the sensitizer is the above-mentioned curcumin sensitizer containing a diazo group.

[0035] Specifically, the photoresist composition consists of 50-90 parts by mass of film-forming resin, 10-50 parts by mass of the curcumin sensitizer containing diazo groups, 1-10 parts by mass of dye additives and 200 parts by mass ...

Embodiment 1-3

[0053] Embodiment 1-3 is the synthetic example of diazocurcumin sensitizer

Embodiment 1

[0054] Embodiment 1: the synthesis of the curcumin sensitizer containing diazo group

[0055] 1.2mmol NaN 3 Add 20mL of acetonitrile, heat to 94°C to dissolve and disperse evenly, cool to 0°C, add 1.2mmol of 2-chloro-1,3-dimethyl imidazolinium chloride, stir for 1h, at this time, in the reaction mixture Add (1.0mmol) curcumin dissolved in 3mL tetrahydrofuran (THF) obtained solution, then add 2.0mmol triethylamine, react at 0°C for 2h. Poured into 40 mL of water, extracted with 100 mL of ethyl acetate, collected the organic phase, dried over anhydrous sodium sulfate, filtered, and rotary evaporated to obtain an orange solid product with a yield of 94.8%.

[0056] Infrared, nuclear magnetic and mass spectrometry analyzes of the final product show that the obtained product is a compound represented by formula I, and the purity of the product is very high, reaching 95%.

[0057]

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Abstract

The invention discloses a photosensitive agent containing a diazo group, a photoresist composition for a diazo positive LCD and a preparation method thereof. The curcumin sensitizer containing diazo group of the present invention is a compound with structural formula as shown in formula I: the photoresist composition of the present invention includes film-forming resin, the curcumin sensitizer containing diazo group and organic solvents. The molecular weight of the diazonaphthoquinone sensitizer of the present invention is 394, compared with the existing diazonaphthoquinone sensitizer formed by the esterification of the esterified parent and diazonaphthoquinone sulfonyl chloride, higher resolution can be obtained, and the molecular weight A small size can make the degumming process easier and less prone to residue. Moreover, the preparation yield is high and the thermal stability is good. It is combined with the traditional film-forming resin to form a positive photoresist for LCD TFT with good storage stability and high resolution, so as to solve the problems of difficult refining, poor storage stability and low resolution of the current LCD photoresist of the diazonaphthoquinone system question.

Description

technical field [0001] The invention relates to a photosensitive agent containing a diazo group, a photoresist composition for a diazo positive LCD and a preparation method thereof, in particular to a synthesis of a photosensitive agent containing a diazocurcumin and a film-forming resin prepared therefrom A high-resolution ultraviolet (UV) positive photoresist composition using ultraviolet light as an exposure light source for LCD TFT, its special diazo group-containing photosensitizer and its preparation method. Background technique [0002] Photoresists are key functional materials for photolithography processes in the large-scale integrated circuit industry. After the photoresist is irradiated by ultraviolet light, a series of chemical reactions occur, which changes the dissolution rate of the photoresist in the developer before and after exposure, and then through the processes of developing, hardening, etching and removing the film, the specific high Precision graphic...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/016G03F7/039C07C245/14
Inventor 汪建国
Owner BOE TECH GRP CO LTD
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