Photosensitizer containing diazo group, photoresist composition and preparation methods of photosensitizer and photoresist composition

A photosensitive agent and photoresist technology, which is applied in the field of diazo group-containing photosensitive agent, photoresist composition and its preparation, can solve the problems of poor adhesion and corrosion resistance, poor storage stability, and small exposure wide capacity , to achieve the effect of not easy to decompose, not easy to residue, and high storage stability

Active Publication Date: 2015-03-04
BOE TECH GRP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Of course, there are also some disadvantages, such as difficult to refine, easy to produce pinholes, poor adhesion and corrosion resistance, poor storage stability, small exposure width, etc.

Method used

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  • Photosensitizer containing diazo group, photoresist composition and preparation methods of photosensitizer and photoresist composition
  • Photosensitizer containing diazo group, photoresist composition and preparation methods of photosensitizer and photoresist composition
  • Photosensitizer containing diazo group, photoresist composition and preparation methods of photosensitizer and photoresist composition

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preparation example Construction

[0031] Based on the present invention, the present invention provides a curcumin photosensitizer containing diazo group capable of improving thermal stability and resolution of photoresist, a preparation method thereof and a photoresist composition containing the photosensitizer.

[0032] The curcumin sensitizer containing diazo group of the present invention has a structural formula as shown in formula I:

[0033]

[0034] The invention provides a positive photoresist composition for LCD TFT. In order to obtain higher resolution, the photoresist composition of the invention includes a film-forming resin, a photosensitive agent and an organic solvent. Wherein the sensitizer is the above-mentioned curcumin sensitizer containing a diazo group.

[0035] Specifically, the photoresist composition consists of 50-90 parts by mass of film-forming resin, 10-50 parts by mass of the curcumin sensitizer containing diazo groups, 1-10 parts by mass of dye additives and 200 parts by mass ...

Embodiment 1-3

[0053] Embodiment 1-3 is the synthetic example of diazocurcumin sensitizer

Embodiment 1

[0054] Embodiment 1: the synthesis of the curcumin sensitizer containing diazo group

[0055] 1.2mmol NaN 3 Add 20mL of acetonitrile, heat to 94°C to dissolve and disperse evenly, cool to 0°C, add 1.2mmol of 2-chloro-1,3-dimethyl imidazolinium chloride, stir for 1h, at this time, in the reaction mixture Add (1.0mmol) curcumin dissolved in 3mL tetrahydrofuran (THF) obtained solution, then add 2.0mmol triethylamine, react at 0°C for 2h. Poured into 40 mL of water, extracted with 100 mL of ethyl acetate, collected the organic phase, dried over anhydrous sodium sulfate, filtered, and rotary evaporated to obtain an orange solid product with a yield of 94.8%.

[0056] Carrying out infrared, nuclear magnetic and mass spectrum analysis to final product shows that the product obtained is the compound shown in formula I, and the purity of product is very high, reaches 95%.

[0057]

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PUM

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Abstract

The invention discloses a photosensitizer containing a diazo group, a diazo positive photoresist composition for a liquid crystal display (LCD) and preparation methods of the photosensitizer and the photoresist composition. The curcumin photosensitizer containing the diazo group is a compound with the structure shown in formula I described in the specification; the photoresist composition comprises film-forming resin, the curcumin photosensitizer containing the diazo group, and an organic solvent. The curcumin photosensitizer containing the diazo group has the molecular weight of 394; compared with the existing diazo naphthoquinone photosensitizer formed by carrying out esterification on esterification parent and diazo naphthoquinone sulfonyl chloride, the curcumin photosensitizer containing the diazo group is higher in resolution ratio and small in molecular weight, enables the photoresist removing process to be easy, and is less in residue. Furthermore, the curcumin photosensitizer is high in preparation yield and good in heat stability. The positive photoresist which is used for an LCD thin film transistor (TFT) and is good in storage stability and high in resolution ratio can be formed by combining the curcumin photosensitizer and the traditional film-forming resin, so that the problems that the existing diazo naphthoquinone system LCD photoresist is difficult to refine, poor in storage stability and lower in resolution ratio can be solved. The following is the formula I (in the specification).

Description

technical field [0001] The invention relates to a photosensitive agent containing a diazo group, a photoresist composition for a diazo positive LCD and a preparation method thereof, in particular to a synthesis of a photosensitive agent containing a diazocurcumin and a film-forming resin prepared therefrom A high-resolution ultraviolet (UV) positive photoresist composition using ultraviolet light as an exposure light source for LCD TFT, its special diazo group-containing photosensitizer and its preparation method. Background technique [0002] Photoresists are key functional materials for photolithography processes in the large-scale integrated circuit industry. After the photoresist is irradiated by ultraviolet light, a series of chemical reactions occur, which changes the dissolution rate of the photoresist in the developer before and after exposure, and then through the processes of developing, hardening, etching and removing the film, the specific high Precision graphic...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/016G03F7/039C07C245/14
Inventor 汪建国
Owner BOE TECH GRP CO LTD
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