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Molybdenum disulfide nano sheet and preparation method thereof

A technology of nano flakes and molybdenum disulfide, which is applied in the field of molybdenum disulfide nano flakes and its preparation, can solve the problems that the performance of electronic devices is difficult to meet the application requirements, the crystal quality of the molybdenum disulfide nano flakes is poor, and the amount of mechanical peeling is small. , to achieve the effect of easy mass production, special morphology, and uniform growth in a large area

Active Publication Date: 2015-03-18
THE NAT CENT FOR NANOSCI & TECH NCNST OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Molybdenum disulfide nanosheets prepared by lithium ion intercalation have poor crystal quality and many structural defects, so the performance of electronic devices prepared by this method is difficult to meet the application requirements;
[0006] 2) Although the mechanical exfoliation method can obtain high-quality single-layer molybdenum disulfide flakes, the amount of mechanical exfoliation is very small and cannot be applied on a large scale;
Therefore, the thicker molybdenum disulfide flakes in this invention are still not competitive in high-end electronic devices compared to single-layer molybdenum disulfide

Method used

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  • Molybdenum disulfide nano sheet and preparation method thereof
  • Molybdenum disulfide nano sheet and preparation method thereof
  • Molybdenum disulfide nano sheet and preparation method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0049] (1) Use such as figure 2 In the shown chemical vapor deposition device, the untreated molybdenum trioxide powder 5 is placed in the middle of the quartz boat as the molybdenum source, and the quartz boat is placed in the quartz tube so that the molybdenum source is located in the central area of ​​the tube furnace. Use a vacuum pump to exhaust the air in the quartz tube, and then introduce an inert gas, and cycle like this for 3 times to exhaust the oxygen in the quartz tube as much as possible. Then continuously blow 250 sccm of inert gas into the quartz tube for 30 minutes to exhaust oxygen as much as possible. Then start heating, the inert gas flow rate is maintained at 25 sccm during the heating process, and the temperature increase rate is controlled to be 10 °C / min;

[0050] (2) When the temperature in the central area of ​​the tube furnace reaches 720°C, the carrier gas loaded with carbon disulfide is introduced (before the quartz tube is passed into the bubble...

Embodiment 2

[0057] Molybdenum disulfide nanoflakes were prepared according to the method in Example 1. The difference is that when the temperature in the central area of ​​the tube furnace reaches 750°C, the carrier gas loaded with carbon disulfide vapor is introduced at a flow rate of 250 sccm, and the tube furnace is turned off after 5 minutes of reaction. The scanning electron micrograph of the product that present embodiment obtains is as Figure 7 shown. This result is similar to the result of Example 1, and uniform molybdenum disulfide nanosheets have also grown.

Embodiment 3

[0059] Molybdenum disulfide nanoflakes were prepared according to the method in Example 1. The difference is that when the temperature in the central area of ​​the tube furnace reaches 690°C, the carrier gas loaded with carbon disulfide vapor is introduced at a flow rate of 20 sccm, and the tube furnace is turned off after 60 minutes of reaction. The scanning electron micrograph of the product that present embodiment obtains is as Figure 8 shown. The results of this example are similar to those of Examples 1 and 2, and uniform molybdenum disulfide nanosheets were also grown.

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Abstract

The invention relates to a molybdenum disulfide nano sheet and a preparation method thereof. In inert atmosphere, sulfur source and molybdenum source enable steam contact and chemical vapor deposition, vertical molybdenum disulfide nano sheet can be formed on a substrate; the reaction condition for chemical vapor deposition is characterized in that the reaction temperature is 690-750 DEG C, and reaction time is 5-60 minutes. The molybdenum disulfide nano sheet has the advantages of special morphology and uniform size, most part of the molybdenum disulfide nano sheet is single layer, uniform growth in large area can be realized, the size is 0.3-2mum, and the thickness of molybdenum disulfide nano sheet is less than 1nm. Compared with a traditional preparation method of molybdenum disulfide sheet layer, the method of the invention has the advantages of simple technology, convenient operation, easy realization of large scale production, and low requirement on experiment environment; carbon disulfide is used for replacing a traditional solid phase or gas phase sulfur source, so that defects of difficult control of sulfur source introduction and cut-off time point by the solid state sulfur source can be overcome, and hidden trouble for usage of inflammable and explosive gaseous state sulfur source can be simultaneously avoided.

Description

technical field [0001] The invention belongs to the field of nanometer material preparation, and in particular relates to a molybdenum disulfide nanosheet and a preparation method thereof. Background technique [0002] In the field of nanotechnology, the rapid development of graphene in recent years has made layered materials become a research hotspot again. Layered materials are stacked by two-dimensional molecular layers through weak interlayer interactions. As the dimensionality decreases, the electronic structure of layered materials is significantly different from that of bulk materials. [0003] As a typical graphene-like layered material, molybdenum disulfide has also attracted people's attention for its unique structure and electronic properties. The monolayer molybdenum disulfide is a sandwich layer composed of three layers of S-Mo-S atoms (see figure 1 ), the thickness is only And it has a direct band gap of about 1.78eV. These characteristics make the monolaye...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01G39/06
CPCB82Y40/00C01G39/06C01P2002/82C01P2004/03C01P2004/04C01P2004/22
Inventor 江帅贺蒙殷雄李建业
Owner THE NAT CENT FOR NANOSCI & TECH NCNST OF CHINA
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