Based on 3D zno@mno <base:sub> 2</base:sub> Composite nano-array interdigitated electrode supercapacitor and preparation method thereof
A supercapacitor and interdigitated electrode technology, applied in the field of energy storage, can solve the problems of difficulty in adapting to the development requirements of high-power and high-energy flexible transparent supercapacitors, difficulty in applying solid-state electronic devices, and poor safety, so as to meet the requirements of high-power , to meet the charging and discharging needs, the effect of strong flexibility
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Embodiment 1
[0045] Preparation of ZnO@MnO 2 Composite nanoarray interdigitated electrodes
[0046] 1. Substrate selection: choose PET as the substrate, and treat it with an oxygen plasma surface treatment machine for 2 minutes.
[0047] 2. Design of interdigitated electrodes: use semiconductor device micro-processing technology to process interdigitated electrode patterns on PET substrates. The pattern design of the interdigitated electrode used as a UV lithography mask is as follows: figure 1 shown. It can be seen from the figure that the number of pairs of prepared interdigital electrodes is 8 pairs, and the spacing and finger width between the interdigital electrodes are 100 microns. The operating conditions of the photolithography process are: the photoresist model used for ultraviolet lithography is AZ4620, the coating thickness is 3 microns, the coating speed is 2000 rpm, the pre-baking temperature is 105 degrees, the exposure time is 25s, and the developing time For 70s, an int...
Embodiment 2
[0053] Fabrication of flexible transparent solid-state 3D supercapacitors
[0054] Dissolve lithium chloride and PVA in an appropriate amount of deionized water at a mass ratio of 2:1, and stir in a water bath at 85°C for 1 hour to obtain a solid electrolyte. Spread the solid electrolyte evenly on the prepared interdigitated capacitor and encapsulate it with PMMA to obtain a flexible transparent solid supercapacitor, such as Figure 4 As shown, it can be seen from the figure that the solid supercapacitor has a length of about 5 cm, high transparency, can be bent, and has good flexibility. The cyclic voltammetry curves of the prepared flexible transparent solid supercapacitor are as follows: Figure 5 As shown, it can be seen from the figure that at different scan rates, the CV curves have a nearly rectangular structure, which is a typical amorphous MnO 2 Capacitive characteristics, at a scan rate of 2mV / s, the area capacitance of the device can reach 167mF / cm -2 . Figure ...
Embodiment 3
[0056] Preparation of ZnO@MnO 2 Composite nanoarray interdigitated electrodes
[0057] 1. Substrate selection: select PDMS as the substrate, and treat it with an oxygen plasma surface treatment machine for 2 minutes.
[0058] 2. Design of interdigitated electrodes: use semiconductor device micromachining technology to process interdigitated electrode patterns on PDMS substrates. The pitch and finger width of the interdigitated electrodes used as a UV lithography mask are 2 μm. The operating conditions of the photolithography process are: the photoresist model used for ultraviolet lithography is AZ4620, the coating thickness is 4 microns, the coating speed is 1000 rpm, the pre-baking temperature is 80 degrees, the exposure time is 15s, and the developing time For 65s, an interdigitated electrode pattern was prepared on the PDMS substrate.
[0059] 3. Preparation of collector electrode and ZnO seed layer: using magnetron sputtering, deposit a 60nm Pt film and a 10nm ZnO film ...
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