Method for reducing diameter of self-crimping micron tube by virtue of metal nanoparticles

Abstract

The invention provides a method for reducing the diameter of a self-crimping micron tube by virtue of metal nanoparticles. The method comprises the following steps: depositing a buffer layer on a substrate or a virtual substrate; depositing a sacrificial layer on the buffer layer; depositing a strain thin film on the sacrificial layer; carrying out primary photoetching and corrosion, wherein the strain thin film forms a table-board, so that the sacrificial layer is exposed; carrying out secondary photoetching and forming a pattern window by using photoresist; depositing a metal thin film, and annealing at a high temperature, wherein the metal thin film forms the metal nanoparticles; and laterally corroding the sacrificial layer, wherein the strain thin film covering the metal nanoparticles on the surface is self-crimped to form the tube. On the premise of not changing the thickness of the thin film and strain, the diameter of the self-crimping micron tube can be remarkably reduced just by virtue of the metal nanoparticles and the self-crimping micron tube with the diameter which is near to 1 micron can be easily prepared, and even the nanotube with the diameter which is lower to several hundred nanometers and a regular array can be easily prepared. Meanwhile, the method can ensure that the micron tube or the nanotube has excellent mechanical and structural characteristics.

Description

technical field

[0001] The invention relates to a micron-tube material and a preparation method thereof, belonging to the field of micro-nano materials and micro-nano devices. Background technique

[0002] As a special three-dimensional (3D) micro-nano functional structure, self-curling microtubes and nanotubes prepared by micro-nano self-curling technology have structural characteristics such as hollow channels, separation from the substrate, and controllable size and shape. It is very easy to combine with functional materials (such as quantum wells / quantum dots, metal nanoparticles, luminescent dyes), so it has great potential in the fields of micro-nano electromechanical systems (MEMS / NEMS), optical resonant cavities, biomedical sensing, and microfluidics. The broad application prospects naturally arouse the widespread attention and great research interest of scholars from all over the world.

[0003] The earliest work on the preparation of nanotubes and microtubes using...

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