Three-dimensional sub-wavelength metal cavity structure spectrum multi-tape light perfect absorption plasmon sensor as well as preparation method and application thereof

A metal cavity and perfect absorption technology, applied in the fields of optics, materials and biology, can solve difficult and difficult to apply multi-band sensing detection and other problems, achieve high quality factor, easy multi-functional integration, and simplify the preparation process.

Inactive Publication Date: 2015-04-29
JIANGXI NORMAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This means that the spectral shift caused by the adsorption of biomolecules can be effectively visualized as soon as possible in the spectral frequency shift, but it is very difficult to effectively distinguish such a weak intensity contrast from the electrical signal detected by photoelectric detection.
[0005] In addition, the current research on plasmonic sensors focuses on the characteristics of a single detection frequency band presented by a single spectral response, which is difficult for multi-band sensing detection that requires multi-band detection of various biomolecules or other different dielectric environments. Be applicable

Method used

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  • Three-dimensional sub-wavelength metal cavity structure spectrum multi-tape light perfect absorption plasmon sensor as well as preparation method and application thereof
  • Three-dimensional sub-wavelength metal cavity structure spectrum multi-tape light perfect absorption plasmon sensor as well as preparation method and application thereof
  • Three-dimensional sub-wavelength metal cavity structure spectrum multi-tape light perfect absorption plasmon sensor as well as preparation method and application thereof

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Effect test

Embodiment 1

[0047] The metal subwavelength microcavity plasmon sensor in this embodiment is composed of a metal film (1), a two-dimensional non-close-packed periodic array (2) and a dielectric film (3) sequentially from bottom to top. The schematic diagram of the structure of the two-dimensional non-close-packed periodic array in this embodiment is as follows figure 1 shown. The metal subwavelength microcavity plasmon sensor in this embodiment can be widely used in the analysis and detection of low-concentration organic molecules, biomolecules, and changes in the dielectric constant of the environment.

Embodiment 2

[0049] This embodiment adopts two materials of silver and silicon dioxide. First, a silver film with a thickness of 100 nm is deposited on the glass slide by physical vacuum coating method; secondly, electron beam etching technology is used on the silver film substrate A two-dimensional hexagonal non-close-packed periodic array composed of cross-shaped silver nanosquares was prepared. The array period, square length, width, and height were 110 nm, 104 nm, 52 nm, and 14 nm, respectively. The upper medium layer is air. adopted as figure 1 The optical reflectance spectrum test shown, can be obtained as figure 2 Four narrow-band absorption spectra are shown.

Embodiment 3

[0051] In this embodiment, the metal subwavelength microcavity plasmon sensor obtained in the above-mentioned Example 2 is placed in an atmospheric environment mixed with toxic gases, such as toluene, etc., and then its spectral reflection light signal is directly measured, and the obtained absorption spectrum is as follows image 3 shown. Depend on image 3 It can be seen that with the increase of the toluene gas content in the air and the increase of the refractive index of the mixed gas, the four absorption spectrum peaks all present obvious spectral shifts, reflecting high spectral frequency shift sensitivity and high quality factor FOM (such as Figure 4 ).

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Abstract

The invention discloses a three-dimensional sub-wavelength metal cavity structure spectrum multi-tape light perfect absorption plasmon sensor as well as a preparation method and application thereof. The sensor is composed of a flat seamless metal film, a two-dimensional metal slit micro-cavity array and a medium film in sequence from bottom to top, wherein the thickness of the metal film layer is more than 100 nanometers so that light transmission is inhibited; and the size and shape of a cross-shaped metal block and the period of the two-dimensional metal slit micro-cavity array composed of the cross-shaped metal block can be adjusted. The preparation process is simple and developed and the performances of the sensor present multi-spectrum tape narrow line-width responses; meanwhile, the sensor has high-response sensitivity for spectrum frequency shift and spectrum intensity change, and good tunability of space selective sensing detection and a detection spectrum range; and the geometric dimension of the device structure is in a sub-wavelength range and devices are easy to integrate.

Description

technical field [0001] The invention relates to multiple fields such as optics, materials, and biology, and in particular to a plasmon sensor with a Via wavelength metal cavity structure spectrum multi-band light perfect absorption and a preparation method thereof. Background technique [0002] Biological and environmental sensors are an effective means of analyzing biological and environmental monitoring. It can realize rapid and trace detection and analysis of substances at the single-molecule level. Its principles are generally chemical biosorption, electrochemical reactions, and molecular interactions. The phenomenon causes a change in the signal that is converted into a detectable signal. [0003] The concept of surface plasmons is the collective oscillation caused by metal free electrons under the irradiation of external light waves, which leads to the localization of electromagnetic fields on the metal surface and produces an electric field enhancement effect, ther...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/552
Inventor 刘正奇刘桂强刘晓山邵辉柏黄珊顾刚
Owner JIANGXI NORMAL UNIV
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