Chemical mechanical polishing liquid for titanium

A chemical machinery and polishing liquid technology, applied in the field of polishing liquid, can solve the problems of surface corrosion, difficult to control polishing speed, poor surface performance, etc., and achieve the effect of low surface corrosion, good surface quality and controllable rate.
CN104593776AActive Publication Date: 2015-05-06SHANGHAI XINANNA ELECTRONICS TECH +1
6 Cites 7 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
SHANGHAI XINANNA ELECTRONICS TECH
Publication Date
2015-05-06

Smart Images

  • Figure 1
    Figure 1
  • Figure 2
    Figure 2
  • Figure 3
    Figure 3
Patent Text Reader

Abstract

The invention discloses a chemical mechanical polishing liquid for titanium. Based on the total mass, the chemical mechanical polishing liquid for titanium comprises the following raw material components in percentage by weight: 1-5wt% of an oxidant, 0.01-4wt% of a surfactant, 0.01-3wt% of an organic additive, 0.2-30wt% of polishing particles and the balance of pH regulators and water. According to the chemical mechanical polishing liquid disclosed by the invention, the chemical mechanical polishing liquid of different components is utilized for polishing titanium metal with the advantages of controllable rate, high surface quality and low corrosion, and the requirements on the surface quality of the titanium metal in the industry can be met.
Need to check novelty before this filing date? Find Prior Art

Description

technical field

[0001] The invention relates to a polishing liquid, in particular to a chemical mechanical polishing liquid for titanium. Background technique

[0002] Titanium has significant advantages such as high specific strength, good corrosion resistance, high heat resistance, and good biocompatibility, so it is widely used in high-tech fields such as medicine, aerospace, and microelectronics. Since the 1950s, research on titanium alloys has shown a blowout trend. In 1954, the United States took the lead in researching the first-generation titanium alloy Ti-6Al-4V (Ti64 for short). This alloy is the trump card alloy in the titanium alloy industry, and its usage accounts for 75% to 80% of all titanium alloys. In the 1950s and 1960s, the high temperature resistance and high specific strength of titanium alloys were further emphasized and improved, and they were gradually used in the manufacture of structural devices for aircraft and space shuttles. In the 1980s, the h...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More