A kind of manufacturing method and products thereof of metal mesh with high conductivity and low reflectivity
A metal grid, low reflectivity technology, applied in the direction of electrical digital data processing, input/output process of data processing, instruments, etc., can solve the problem of uneven line width of silver metal grid, difficult control of dimensional accuracy of exposure machine, Long exposure time and other issues, to achieve the effect of reducing reflectivity, easy to operate, and simple preparation process
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[0028] A method for manufacturing a metal grid with high conductivity and low reflectivity, comprising the following steps:
[0029] (1) Coating photoresist layers (1, 2) on the transparent substrate 3, the thickness of the photoresist layer is 20-60 microns, and the photoresist layer is formed by stacking two layers of photoresist layers with different etching rates (such as Figure 1~3 shown); and, the plasma etching rate of the photoresist material selected for the upper photoresist layer 1 is greater than the plasma etching rate of the photoresist material selected for the lower photoresist layer 2;
[0030] (2) The photoresist layer (1, 2) is imprinted by using the embossing template 4 with a raised circuit pattern on the bottom, and after the embossing template 4 is pulled out, a circuit pattern is formed in the photoresist layer (1, 2) Groove 5 (eg figure 2 shown);
[0031] (3) Carry out plasma etching to the photoresist layer (1, 2) after embossing, expose transpare...
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