A Randomly Coded Hybrid Grating Based on Luminous Flux Constraint

A technology of random coding and hybrid grating, applied in the field of random coding hybrid grating, can solve the problems of complex system structure, unfavorable instrument adjustment, interference effects, etc., and achieve the effects of simplifying system structure, improving system stability, and improving detection accuracy.
CN104656173BActive Publication Date: 2017-05-03ZHEJIANG UNIV
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Patents(China)
Current Assignee / Owner
ZHEJIANG UNIV
Publication Date
2017-05-03

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Abstract

The invention discloses a randomly-coded hybrid grating based on a light flux constraint. The randomly-coded hybrid grating comprises a non-transparent mask S2 and a transparent substrate S1, wherein the mask S2 covers a partial region of the substrate S1, so that the light flux of each square region with the area of S on the grating meets distribution as shown in a FORMULA, in which d is the grating distance of the randomly-coded hybrid grating, and mask blocks in each square region with the area of S are randomly distributed; the region, within the range as shown in a FORMULA and not covered by the mask, of the substrate S1 is etched, so that at the etching depth, light wave penetrating through a light-transmittable part of the etched region is advanced by phi phase relative to light wave penetrating through a light-transmittable part of the non-etched substrate. On one hand, the randomly-coded hybrid grating omits a level selection window in four-wavefront lateral shearing interference of a conventional cross grating, simplifies the structure of a system and improves the stability of the system; on the other hand, interference from other diffraction levels in a formed four-wavefront lateral shearing interference pattern is reduced and the detection precision of a wavefront to be detected is improved.
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Description

technical field

[0001] The invention belongs to the field of light beam wavefront detection, in particular to a randomly coded hybrid grating based on luminous flux constraint used in a four-wave transverse shearing interferometer. Background technique

[0002] Transverse shearing interference technology utilizes the wavefront to be measured for dislocation interference, so as to realize the direct measurement of the phase of the wavefront. Since it adopts a common path system and does not need a reference beam, the interference fringes are stable, the anti-interference ability is strong, and the environmental requirements are low. , the instrument structure is simple. Based on the above advantages, transverse shearing interferometry is often used in the inspection and measurement of optical materials and components, the detection of beam properties and parameters, optical system calibration, inspection and evaluation, etc.

[0003] The traditional transverse shearing inter...

Claims

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